放电加工极间等离子体伏安特性与间距建模研究
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摘要
放电加工中,工具电极和工件间的间距确定是该类加工方法中的难点,间距过大,导致放电加工过程停止,间距过小,则会产生短路或者工件表面烧伤等。因此,获得合理的放电加工过程的极间间距范围,并精确的描述其模型成为关键。以N型单晶Si的放电加工为背景,分析了极间绝缘介质被击穿后放电通道中等离子体伏安特性曲线的变化趋势,从理论上证明了放电通道可等效为纯电阻模型。通过最小二乘拟合得到等效电阻率与极间间距的模型,进一步推出极间间距与电压、电流的数学模型。在试验的基础上结合3σ检验法对模型进行验证,结果表明,所建立的模型可以描述实际加工过程中的极间间距。
During electric discharge machining(EDM), it is difficult for to determine the gap between tool electrode and workpiece,the large gap results in half of discharge machining, and small gap results in short circuit or faults such as surface burning of workpiece. The reasonable range and model of the gap between electrodes during discharge process is the key. As N type single crystal silicon for example, the variation trend of V-A characteristic curve of the plasma in discharge channel after the dielectric between electrodes breaks down are analyzed, theoretically demonstrates that the discharge channel is equivalent to a pure resistance model. A mathematic model between equivalent electrical resistivity and gap between electrodes is obtained through least square fitting. The model of gap between electrodes and voltage and current is tested based on experiment by combining 3σ test, the experiment result shows that the established gap model between electrodes can describe the gap between electrodes during actual machining process.
During electric discharge machining(EDM), it is difficult for to determine the gap between tool electrode and workpiece,the large gap results in half of discharge machining, and small gap results in short circuit or faults such as surface burning of workpiece. The reasonable range and model of the gap between electrodes during discharge process is the key. As N type single crystal silicon for example, the variation trend of V-A characteristic curve of the plasma in discharge channel after the dielectric between electrodes breaks down are analyzed, theoretically demonstrates that the discharge channel is equivalent to a pure resistance model. A mathematic model between equivalent electrical resistivity and gap between electrodes is obtained through least square fitting. The model of gap between electrodes and voltage and current is tested based on experiment by combining 3σ test, the experiment result shows that the established gap model between electrodes can describe the gap between electrodes during actual machining process.
引文
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[19]KATSUSHI F,DAISUKE H.Condition monitoring in concurrent micro-hole electrical discharge machining with electrode feeding devices employing AZARASHI(seal)mechanism[J].Procedia CIRP,2014,14:424-429.
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[22]DAUW D F,SNOEYS R,DEKEYSER W.Advanced pulse discriminating system for edm process analysis and control[J].CIRP Annals-Manufacturing Technology,1983,32(2):541-549.
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[25]RAJURKAR K P,WANG W M.Improvement of EDMperformance with advanced monitoring and control systems[J].Journal of manufacturing science and engineering,1997,119(4B):770-775.
[26]HAN Fuzhu,WACHI S,MASANORI K.Improvement of machining characteristics of micro-EDM using transistor type isopulse generator and servo feed control[J].Precision Engineering,2004,28(4):378-385.
[27]BHATTACHARYYA S K,EL-MENSHAWY M F.Monitoring and controlling the EDM process[J].Journal of Manufacturing Science and Engineering,1980,102(3):189-194.
[28]BHATTACHARYYA S K.,EL-MENSHAWY M F.Monitoring the EDM process by radio signals[J].International Journal of Production Research,1978,16(5):353-363.
[29]YU S F,LEE B Y,LIN W S.Waveform monitoring of electric discharge machining by wavelet transform[J].The International Journal of Advanced Manufacturing Technology,2001,17(5):339-343.
[30]TARNG Y S,TSENG C M,CHUNG L K.A fuzzy pulse discriminating system for electrical discharge machining[J].International Journal of Machine Tools and Manufacture,1997,37(4):511-522.
[31]KAO J Y,TARNG Y S.A neutral-network approach for the on-line monitoring of the electrical discharge machining process[J].Journal of Materials Processing Technology,1997,69(1):112-119.
[32]PAJAK E,WIECZOROWSKI K.Classification of discharges in electrocontact discharge machining(ECDM)by means of neural networks[J].VDI BERICHTE,1998,1405:225-232.
[33]LI Minghui.EDM theoretical basis[M].Beijing:National Defense Industry Press,1989.
[34]KOJIMA A,NATSU W,KUNIEDA M.Spectroscopic measurement of arc plasma diameter in EDM[J].CIRPAnnals-Manufacturing Technology,2008,57(1):203-207.
[35]CHANG Weijie,CHEN Yuanlong,ZHANG Jianhua,et al.Single pulse discharge channel expansion laws of EDM[J].Journal of Mechanical Engineering,2016,52(9):208-212.
[2]IBRAHIM G A,HARON C H C,GHANI J A.The effect of dry machining on surface integrity of titanium alloy Ti-6Al-4V ELI[J].Journal of Applied Sciences,2009,9(1):121-127.
[3]KUNIEDA M,LAUWERS B,RAJURKAR K P,et al.Advancing EDM through fundamental insight into the process[J].CIRP Annals-Manufacturing Technology,2005,54(2):64-87.
[4]KATSUSHI F,DAISUKE H.Condition monitoring in concurrent micro-hole electrical discharge machining with electrode feeding devices employing AZARASHI(seal)mechanism[J].Procedia CIRP,2014,14:424-429.
[5]YAN B H,TSAI H C,HUANG F Y.The effect in EDM of a dielectric of a urea solution in water on modifying the surface of titanium[J].International Journal of Machine Tools and Manufacture,2005,45(2):194-200.
[6]CHEN Haoran,LIU Zhidong,HUANg Raijuan,et al.Study of the mechanism of multi-channel discharge in semiconductor processing by WEDM[J].Materials Science in Semiconductor Processing,2015,32:125-130.
[7]YOSHIYUKI U,AKIRA O,YASUHIRO O,et al.Wire EDM slicing of monocrystalline silicon ingot[C]//Proceedings of ASPE 2000 Annual Conference Volume,2000:172-175.
[8]PUERTAS I,LUIS C J,VILLA G.Spacing roughness parameters study on the EDM of silicon carbide[J].Journal of Materials Processing Technology,2005,164-165(10):1590-1596.
[9]LUIS C J,PUERTAS I,VILLA G.Material removal rate and electrode wear study on the EDM of silicon carbide[J].Journal of Materials Processing Technology,2005,164-165(10):889-896.
[10]NIRDESH O,TIM H,FLORIAN Z,et al.Major parameters affecting the electric discharge machining of non-conductive SiC[C]//Proceedings of the 10th International Conference on Multi-Material Micro Manufacture Micro Manufacture,University of freibury,Rabino Azc′arate and Stefan Dimov,2013:978-981.
[11]JI Renjie,LIU Yonghong,ZHANG Yanzhen,et al.High-speed end electric discharge milling of silicon carbide ceramics[J].Materials and Manufacturing Processes,2011,26(8):1050-1058.
[12]YU Bohuai,LEE Hsiangkuo,LIN Yangxin,et al.Study of wire electrical discharge machining for poly-silicon[C].//Asian Symposium for Precision Engineering and Nanotechnology 2009,2009:170-174.
[13]ZHOU Ming,HAN Fuzhu,MENG Xianyi,et al.Analysis and control of electrical discharge machining(EDM)process[C]//IEEE,2009:164-168.
[14]ZHOU Ming,HAN Fuzhu,SOICHIRO I.A time-varied predictive model for EDM process[J].International Journal of Machine Tools and Manufacture,2008,48(15):1668-1677.
[15]MUSLIM M,KIMIYUKI M.A new method for monitoring micro-electric discharge machining processes[J].International Journal of Machine Tools and Manufacture,2008,48(3-4):446-458.
[16]MUSLIM M,TAKAYUKI T,KIMIYUKI M.A new approach on the determination of ease of machining by EDM processes[J].International Journal of Machine Tools and Manufacture,2008,48(7-8):746-760.
[17]SNOEYS R,DAUW D F,KRUTH J P.Survey of EDMadaptive control in electro discharge machining[J].Journal of Manufacturing Systems,1983,2(2):147-164.
[18]KUNIEDA M,LAUWERS B,RAJURKAR K P,et al.Advancing EDM through fundamental insight into the process[J].CIRP Annals-Manufacturing Technology,2005,54(2):64-87.
[19]KATSUSHI F,DAISUKE H.Condition monitoring in concurrent micro-hole electrical discharge machining with electrode feeding devices employing AZARASHI(seal)mechanism[J].Procedia CIRP,2014,14:424-429.
[20]RAJURKAR K P,WANG W M,LINDSAY R P.A new model reference adaptive control of EDM[J].CIRPAnnals-Manufacturing Technology,1989,38(1):183-186.
[21]BEHRENS A W,GINZEL J,BRUHNS F L.Threshold technology and its application for gap status detection[J].Journal of Materials Processing Technology,2004,149(1-3):310-315.
[22]DAUW D F,SNOEYS R,DEKEYSER W.Advanced pulse discriminating system for edm process analysis and control[J].CIRP Annals-Manufacturing Technology,1983,32(2):541-549.
[23]SNOEYS R,DAUW D,KRUTH J P.Improved adaptive control system for EDM processes[J].CIRP AnnalsManufacturing Technology,1980,29(1):97-101.
[24]WONG Y S,EDKINS M,NOBLE C F.An investigation of the power output and gap voltage during electrical discharge machining using microcomputer-based instrumentation[J].International Journal of Machine Tools and Manufacture,1987,27(2):191-214.
[25]RAJURKAR K P,WANG W M.Improvement of EDMperformance with advanced monitoring and control systems[J].Journal of manufacturing science and engineering,1997,119(4B):770-775.
[26]HAN Fuzhu,WACHI S,MASANORI K.Improvement of machining characteristics of micro-EDM using transistor type isopulse generator and servo feed control[J].Precision Engineering,2004,28(4):378-385.
[27]BHATTACHARYYA S K,EL-MENSHAWY M F.Monitoring and controlling the EDM process[J].Journal of Manufacturing Science and Engineering,1980,102(3):189-194.
[28]BHATTACHARYYA S K.,EL-MENSHAWY M F.Monitoring the EDM process by radio signals[J].International Journal of Production Research,1978,16(5):353-363.
[29]YU S F,LEE B Y,LIN W S.Waveform monitoring of electric discharge machining by wavelet transform[J].The International Journal of Advanced Manufacturing Technology,2001,17(5):339-343.
[30]TARNG Y S,TSENG C M,CHUNG L K.A fuzzy pulse discriminating system for electrical discharge machining[J].International Journal of Machine Tools and Manufacture,1997,37(4):511-522.
[31]KAO J Y,TARNG Y S.A neutral-network approach for the on-line monitoring of the electrical discharge machining process[J].Journal of Materials Processing Technology,1997,69(1):112-119.
[32]PAJAK E,WIECZOROWSKI K.Classification of discharges in electrocontact discharge machining(ECDM)by means of neural networks[J].VDI BERICHTE,1998,1405:225-232.
[33]LI Minghui.EDM theoretical basis[M].Beijing:National Defense Industry Press,1989.
[34]KOJIMA A,NATSU W,KUNIEDA M.Spectroscopic measurement of arc plasma diameter in EDM[J].CIRPAnnals-Manufacturing Technology,2008,57(1):203-207.
[35]CHANG Weijie,CHEN Yuanlong,ZHANG Jianhua,et al.Single pulse discharge channel expansion laws of EDM[J].Journal of Mechanical Engineering,2016,52(9):208-212.