光纤干涉条纹投射相位测量轮廓术关键技术研究
摘要
光学三维形貌测量技术在自动测试和品质保证、CAD/CAM、逆向工程、疾病诊断、服装订制及视觉导航等领域中有着重要的应用，是质量检测、生物医学以及纳米技术等方面进行科学探索的重要手段。本文研究基于杨氏双孔干涉原理的光纤干涉条纹投射相位测量轮廓术，实现高精度正弦条纹投射，针对光纤干涉臂相位差易受环境干扰，使得投射条纹相位波动，进而影响测量精度的问题，通过对光纤干涉臂相位差的精确测量与控制实现投射条纹的相位稳定和相移，分别通过傅里叶变换轮廓术和相移轮廓术实现对物体表面的全场高精度非接触动、静态测量。实验证明光纤干涉条纹投射相位测量系统相移精度高，相移速度快，适于高精度三维形貌测量。主要研究内容如下：
1.利用马赫泽德干涉仪结构及杨氏双孔干涉原理实现光纤干涉条纹投射；建立光纤干涉条纹投射的三维形貌测量模型，并考虑光纤干涉臂相位差对该模型的影响；分析光纤干涉投射条纹相位波动的原因，包括背向散射光对激光器输出波长影响，光纤偏振敏感性，环境温度变化对光纤干涉臂相位差的影响等，实验验证，环境温度变化对光纤干涉臂相位差的影响是条纹相位波动的主要原因。
2.为解决光纤干涉臂相位差易受环境干扰进而带来投射条纹相位波动的问题，提出利用光纤端面的菲涅尔反射干涉信号、压电陶瓷外调制技术等实现光纤干涉臂相位差的精确测量与控制，进而实现投射条纹相位的稳定与相移。建立了光纤干涉臂相位差的控制系统模型，对相关系统参数进行标定，实现了基于直流相位跟踪的光纤干涉臂相位差稳定系统。
3.提出一种采用交流小相位光纤相位调制技术，结合光纤端面菲涅尔反射干涉信号的解调，实现光纤干涉投射条纹相位的精确测量控制方法，从而实现高精度闭环步进相移。提出通过光纤端面菲涅尔反射干涉信号谐波抑制比来估计条纹相移精度的方法。
4.提出旋转矩形窗选择算法实现二维傅里叶变换相位轮廓术中带通窗口的自动选择方法，克服了光学系统变化引起的条纹密度和条纹方向的变化；结合基于DCT的最小二乘相位解包裹算法实现物体表面相位快速自动化测量，使得整个傅里叶变换轮廓术算法复杂度为O(nlogn)；对于400×400像素图像，整个测量时间优于200ms。
5.对条纹图像处理进行研究，通过软件算法的优化，分析和提出多种条纹图像滤波方法和相位解包裹算法，研究任意步距步进相移轮廓术算法等。
The optical three-dimensional shape measurement technology has importantapplications in the fields of automated testing, quality assurance, CAD/CAM, reverseengineering, disease diagnosis, custom clothing and visual navigation, it is animportant means of scientific exploration for quality testing,biomedical and nanotechnology.A new three-dimensional shape measurement systemis designed using optical fiber interferometer projected stripes that two output fibersof the coupler were brought close together to form the pinholes of a Young’s DoublePinhole Interferometer, achieved precisely fringe projection. Because of the phasedifference between the two output optical fiber ends is sensitive to the environmentalchange, making the phase of the projected fringe drifting and thereby affectingthe measurement accuracy. By use of precise measurement and control of the phasedifference between the output fiber ends to realize phase stability and shifting forthe projected fringe.I individually utilize Fourier transform profilometry andphase-shifting profilometry for the full-field dynamic or static non-contractthree-dimensional shape measurement. Experimental results show thatthe fiber-optic interference fringe projection system has the advantage of highprecision and high speed phase shifting and is suitable for precisely three-dimensionalshape measurement. The main contents are as follows:
1. Used Mach-Zehnder interferometer structure to generate optical fiber Young'sdouble hole interference fringe projection. Build the fiber-optic interference fringeprojection three-dimensional shape measurement model considering the phasedifference drifting between the output fiber ends. Analysis the reason for thephase fluctuation of the projected fringe which including the laser output wavelengthchange due to the backscatter light, the fiber-optic polarization sensitivity, ambienttemperature change for the phase difference between the output fiber ends.Experimental results show ambient temperature change for the phase differencebetween the output fiber ends is the main reason for the phase fluctuation ofthe projected fringe.
2. To resolve the problem of the phase drifting for the projected fringe due to thephase difference fluctuation between the output fiber ends, by use of the Fresnelreflection signal from the distal fiber ends, phase modulation by piezoelectric ceramic Etc. to reach precise measurement and control of the phase difference between theoutput fiber ends and realize phase stability and phase shifting for the projected fringe.Constructed the control model for the phase difference between the output fiber ends,calibrated of the relevant system parameters and stabilized the phase differencebetween the output fiber ends based on the DC phase tracking.
3. Proposed a small phase modulation technique, combined with demodulation ofthe Fresnel reflection signal to reach precise measurement and control of the phasedifference between the output fiber ends and realize closed-loop phase shifting forthe projected fringe. A method based on the ratio of harmonic of the interferencesignal was used to estimate phase step accuracy.
4. A new algorithm called rotating rectangular window auto-selection was in usefor the band-pass filter to overcome the change of the fringe density and directioncaused by adjusting the optical system, combined with DCT-based least squares phaseunwrapping algorithm to achieve rapid automated measurement of the surfacephase.The measuring time is less than200ms for a400×400pixels map.Meanwhile,the complexity of the measuring algorithm is O (nlogn).
5. The stripe image processing was studied through the optimization of softwarealgorithms, analysis and presentation of a variety of stripes image filtering andphase unwrapping algorithm. A lot of phase stepping algorithms were researched forphase profilometry.
1.利用马赫泽德干涉仪结构及杨氏双孔干涉原理实现光纤干涉条纹投射；建立光纤干涉条纹投射的三维形貌测量模型，并考虑光纤干涉臂相位差对该模型的影响；分析光纤干涉投射条纹相位波动的原因，包括背向散射光对激光器输出波长影响，光纤偏振敏感性，环境温度变化对光纤干涉臂相位差的影响等，实验验证，环境温度变化对光纤干涉臂相位差的影响是条纹相位波动的主要原因。
2.为解决光纤干涉臂相位差易受环境干扰进而带来投射条纹相位波动的问题，提出利用光纤端面的菲涅尔反射干涉信号、压电陶瓷外调制技术等实现光纤干涉臂相位差的精确测量与控制，进而实现投射条纹相位的稳定与相移。建立了光纤干涉臂相位差的控制系统模型，对相关系统参数进行标定，实现了基于直流相位跟踪的光纤干涉臂相位差稳定系统。
3.提出一种采用交流小相位光纤相位调制技术，结合光纤端面菲涅尔反射干涉信号的解调，实现光纤干涉投射条纹相位的精确测量控制方法，从而实现高精度闭环步进相移。提出通过光纤端面菲涅尔反射干涉信号谐波抑制比来估计条纹相移精度的方法。
4.提出旋转矩形窗选择算法实现二维傅里叶变换相位轮廓术中带通窗口的自动选择方法，克服了光学系统变化引起的条纹密度和条纹方向的变化；结合基于DCT的最小二乘相位解包裹算法实现物体表面相位快速自动化测量，使得整个傅里叶变换轮廓术算法复杂度为O(nlogn)；对于400×400像素图像，整个测量时间优于200ms。
5.对条纹图像处理进行研究，通过软件算法的优化，分析和提出多种条纹图像滤波方法和相位解包裹算法，研究任意步距步进相移轮廓术算法等。
The optical three-dimensional shape measurement technology has importantapplications in the fields of automated testing, quality assurance, CAD/CAM, reverseengineering, disease diagnosis, custom clothing and visual navigation, it is animportant means of scientific exploration for quality testing,biomedical and nanotechnology.A new three-dimensional shape measurement systemis designed using optical fiber interferometer projected stripes that two output fibersof the coupler were brought close together to form the pinholes of a Young’s DoublePinhole Interferometer, achieved precisely fringe projection. Because of the phasedifference between the two output optical fiber ends is sensitive to the environmentalchange, making the phase of the projected fringe drifting and thereby affectingthe measurement accuracy. By use of precise measurement and control of the phasedifference between the output fiber ends to realize phase stability and shifting forthe projected fringe.I individually utilize Fourier transform profilometry andphase-shifting profilometry for the full-field dynamic or static non-contractthree-dimensional shape measurement. Experimental results show thatthe fiber-optic interference fringe projection system has the advantage of highprecision and high speed phase shifting and is suitable for precisely three-dimensionalshape measurement. The main contents are as follows:
1. Used Mach-Zehnder interferometer structure to generate optical fiber Young'sdouble hole interference fringe projection. Build the fiber-optic interference fringeprojection three-dimensional shape measurement model considering the phasedifference drifting between the output fiber ends. Analysis the reason for thephase fluctuation of the projected fringe which including the laser output wavelengthchange due to the backscatter light, the fiber-optic polarization sensitivity, ambienttemperature change for the phase difference between the output fiber ends.Experimental results show ambient temperature change for the phase differencebetween the output fiber ends is the main reason for the phase fluctuation ofthe projected fringe.
2. To resolve the problem of the phase drifting for the projected fringe due to thephase difference fluctuation between the output fiber ends, by use of the Fresnelreflection signal from the distal fiber ends, phase modulation by piezoelectric ceramic Etc. to reach precise measurement and control of the phase difference between theoutput fiber ends and realize phase stability and phase shifting for the projected fringe.Constructed the control model for the phase difference between the output fiber ends,calibrated of the relevant system parameters and stabilized the phase differencebetween the output fiber ends based on the DC phase tracking.
3. Proposed a small phase modulation technique, combined with demodulation ofthe Fresnel reflection signal to reach precise measurement and control of the phasedifference between the output fiber ends and realize closed-loop phase shifting forthe projected fringe. A method based on the ratio of harmonic of the interferencesignal was used to estimate phase step accuracy.
4. A new algorithm called rotating rectangular window auto-selection was in usefor the band-pass filter to overcome the change of the fringe density and directioncaused by adjusting the optical system, combined with DCT-based least squares phaseunwrapping algorithm to achieve rapid automated measurement of the surfacephase.The measuring time is less than200ms for a400×400pixels map.Meanwhile,the complexity of the measuring algorithm is O (nlogn).
5. The stripe image processing was studied through the optimization of softwarealgorithms, analysis and presentation of a variety of stripes image filtering andphase unwrapping algorithm. A lot of phase stepping algorithms were researched forphase profilometry.
引文
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