近场超声非接触支撑与传输系统的理论与实验研究
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摘要
近场超声悬浮(Near Field Acoustic Levitation简称NFAL)是近年来应用于半导体制造与微机电系统（MEMS）技术领域中非接触式支撑与传输系统的新技术。在半导体制造与微机电系统技术领域，对晶圆的输送与精密定位、微小MEMS零件的装配与操作等精密作业单元提出更高的要求。在传统的晶圆传输与定位过程中，由于机械接触会损坏晶圆表面，并且产生微小颗粒破坏工作空间洁净度，制约了制造技术的发展。鉴于接触式晶圆传输过程中所遇到的问题，本文采用近场超声悬浮实现对非接触传输系统的精确理论建模与设计优化，并通过实验平台的搭建和测试，分析了非接触支撑与输送过程中系统的各项动态性能指标。实验数据与理论计算的吻合也证实了模型的精确度和可靠性。主要研究内容如下：
基于粘性流体运动微分方程，深入研究了近场超声悬浮机理。通过对气体的动态弯曲边界、气体惯性力以及气膜边缘效应建模分析，建立了处于近场超声场的气体挤压膜理论模型。并针对模型的非线性偏微分方程，提出了具有高阶差分格式的数值求解方法和等效近似解析求解方法。模型中加入了对辐射面的弯曲振型的表达项，扩大了模型的适用范围；对于惯性力和边缘效应的建模，更是提高了模型的精度；量化求解实现了模型对悬浮的定量描述，提供了悬浮过程中气膜的压力、流速分布以及悬浮力、推进力等。
建立了非接触传输系统中导轨—气膜—被悬浮物体的动力学耦合模型，分析了竖直的支撑力和水平推进力与行波驱动的基本关系。运用有限差分求解该系统的稳态解和瞬态解。利用模型对气膜表面气压和流速分布的定量描述，分析了平板物体在微小偏移和倾斜的情况下，挤压膜对其产生的回复力和回复力矩，从而讨论具有不同横截面的振子产生的挤压膜的抗干扰能力，为驱动部件的尺寸优化提供理论依据和优化方法。
针对压电驱动部件的机电耦合特点，本文提出换能器与大面积振动头耦合的有限元模型，用于系统驱动部件的分析与设计。通过模型仿真计算，讨论了部件沿轴线方向和横向的振型分布，阻抗特性等。实验结果验证了大面积振动头对整个系统的耦合效应。另外，通过仿真分析了尺寸对器件的机电特性的敏感性，形成了一套对用于近场声悬浮振子的开放式的优化方法。
最后，设计并搭建了非接触悬浮和传输的实验系统和测试平台。针对不同大小的晶圆设计了两种直径的悬浮装置，用于与实验数据的对比分析和验证模型的可靠性。在设计传输系统时，讨论了机械阻抗和电学阻抗匹配问题，并在实验中得出最佳匹配方案。针对支撑与悬浮过程中的各项动态性能指标，设计了动态测试方案，为本文提供有力的数据以便对各理论模型进行全方位评估。实验结果表明，本文提出的理论模型具有较高的精确度，实验误差仅在5%左右，可以用于描述近场超声支撑与悬浮机理，具有定量描述挤压膜内部各参数动态响应的能力，并且能够有效地指导非接触驱动系统的设计与优化。另外，通过大量实验，分析了非接触系统传输过程中的动力学响应特点，总结了实际应用中系统设计与制造的关键技术点，尤其是行波发生和传输对系统尺寸的精确要求，为此项技术工程的实际应用奠定了良好的理论基础。
Near field acoustic levitation (NFAL) has been used in non-contact handling andtransportation of small objects to avoid contamination. In semiconductor manufacturing andmicro-assembly, it is difficult to handle and transfer the wafer or component of MicroElectromechanical System (MEMS) due to their fragility and surface sensitive characteristics.Classical processes usually contain mechanical contacts, which may result in the destructionof fragile parts or cause some degree of surface damage. Also, particles are generated andthus contaminate the working space. The major advantage of NFAL lies in the fact that anymaterial, insulator or conductor, magnetic or non-magnetic, can be manipulated by acousticlevitation and transportation without physical contacts.
The noncontact wafer handling and transportation systems based on NFAL have beenstudied in this dissertation. We have built theoretical models, designed and optimized thedriving parts and built up the experimental systems. We have also tested and analyzeddynamic performances during handling and transporting process. Experimental data matchwell with theoretical calculations, thus proves the accuracy and reliability of our theoreticalmodel. The main research content and achievements are as follows.
Based on viscous fluid equations of motion, we have studied the mechanism of near fieldacoustic levitation. We have built theoretical model of gas squeeze film considering flexuralboundary condition, gas inertia and edge effect. Solving such nonlinear partial differentialequation, high resolution central scheme has been developed in numerical solutions, and approximate analytical solutions have been studied by equivalent method. By accounting theflexural mode shape of the vibrator, we have extended the applications of the theoreticalmodel. By accounting gas inertia and edge effect, accuracy of the model has been improvedgreatly. With high order solutions, our model can provide quantitative analysis for squeezefilms, including velocity and pressure distributions, levitation forces and driving forces.
We have built dynamic models of noncontact systems, including the coupling effect ofrail, gas film and levitated object. The relationship between traveling waves and forces hasbeen studied. Static and transient responses have been solved by finite differential method.According to velocity and pressure distributions of the gas film, we have calculated restoringforces and moments with small eccentric and inclination. Consequently we have discussedthe anti-disturb ability of the gas film generated by vibrators with different cross sections,which provide theoretical basis and optimization method for transducer design.
Piezoelectric transducers have strong electrical-mechanical coupling. The coupled FEAmodel with transducer and large surface vibrator has been built in this dissertation.Simulations have been performed to get mode shapes, amplitude distributions andimpedances, which are used for design of the driving part. The coupling has been proved bymeasurement. Moreover in simulations, dimension sensitivity on electrical-mechanicalcharacteristics has been discussed, which provide a general method for optimizingtransducers used in NFAL.
Finally, noncontact levitation and transportation systems have been built for experimentalresearches. To serve wafers of different size, we have set up two levitation device with tworadiuses, thus enhanced the contrast of different conditions and reliability of data. In thedesign of transportation systems, electrical and mechanical impedance matching has beendiscussed. Optimal matching program can be achieved by experimental debugging. Fortesting of dynamic performance during levitation and transportation, measuring systems havebeen built, which provide powerful data for comprehensive evaluation of noncontact systems. Compared with experimental data, our theoretical model has the highest precision, with erroraround5%. Good agreement with experiment enables the theoretical model to quantitativelyexplain the NFAL mechanism, predict dynamic response inside the squeeze film, and finallyhelp design the noncontact transportation systems effectively. Meanwhile, by large amount ofexperimental tests, key techniques of design and manufacturing have been concluded, forexample, precise requirements in dimensions to guarantee traveling wave generation andtransporting. At this point, it provides a theoretical foundation for practical applications.
基于粘性流体运动微分方程，深入研究了近场超声悬浮机理。通过对气体的动态弯曲边界、气体惯性力以及气膜边缘效应建模分析，建立了处于近场超声场的气体挤压膜理论模型。并针对模型的非线性偏微分方程，提出了具有高阶差分格式的数值求解方法和等效近似解析求解方法。模型中加入了对辐射面的弯曲振型的表达项，扩大了模型的适用范围；对于惯性力和边缘效应的建模，更是提高了模型的精度；量化求解实现了模型对悬浮的定量描述，提供了悬浮过程中气膜的压力、流速分布以及悬浮力、推进力等。
建立了非接触传输系统中导轨—气膜—被悬浮物体的动力学耦合模型，分析了竖直的支撑力和水平推进力与行波驱动的基本关系。运用有限差分求解该系统的稳态解和瞬态解。利用模型对气膜表面气压和流速分布的定量描述，分析了平板物体在微小偏移和倾斜的情况下，挤压膜对其产生的回复力和回复力矩，从而讨论具有不同横截面的振子产生的挤压膜的抗干扰能力，为驱动部件的尺寸优化提供理论依据和优化方法。
针对压电驱动部件的机电耦合特点，本文提出换能器与大面积振动头耦合的有限元模型，用于系统驱动部件的分析与设计。通过模型仿真计算，讨论了部件沿轴线方向和横向的振型分布，阻抗特性等。实验结果验证了大面积振动头对整个系统的耦合效应。另外，通过仿真分析了尺寸对器件的机电特性的敏感性，形成了一套对用于近场声悬浮振子的开放式的优化方法。
最后，设计并搭建了非接触悬浮和传输的实验系统和测试平台。针对不同大小的晶圆设计了两种直径的悬浮装置，用于与实验数据的对比分析和验证模型的可靠性。在设计传输系统时，讨论了机械阻抗和电学阻抗匹配问题，并在实验中得出最佳匹配方案。针对支撑与悬浮过程中的各项动态性能指标，设计了动态测试方案，为本文提供有力的数据以便对各理论模型进行全方位评估。实验结果表明，本文提出的理论模型具有较高的精确度，实验误差仅在5%左右，可以用于描述近场超声支撑与悬浮机理，具有定量描述挤压膜内部各参数动态响应的能力，并且能够有效地指导非接触驱动系统的设计与优化。另外，通过大量实验，分析了非接触系统传输过程中的动力学响应特点，总结了实际应用中系统设计与制造的关键技术点，尤其是行波发生和传输对系统尺寸的精确要求，为此项技术工程的实际应用奠定了良好的理论基础。
Near field acoustic levitation (NFAL) has been used in non-contact handling andtransportation of small objects to avoid contamination. In semiconductor manufacturing andmicro-assembly, it is difficult to handle and transfer the wafer or component of MicroElectromechanical System (MEMS) due to their fragility and surface sensitive characteristics.Classical processes usually contain mechanical contacts, which may result in the destructionof fragile parts or cause some degree of surface damage. Also, particles are generated andthus contaminate the working space. The major advantage of NFAL lies in the fact that anymaterial, insulator or conductor, magnetic or non-magnetic, can be manipulated by acousticlevitation and transportation without physical contacts.
The noncontact wafer handling and transportation systems based on NFAL have beenstudied in this dissertation. We have built theoretical models, designed and optimized thedriving parts and built up the experimental systems. We have also tested and analyzeddynamic performances during handling and transporting process. Experimental data matchwell with theoretical calculations, thus proves the accuracy and reliability of our theoreticalmodel. The main research content and achievements are as follows.
Based on viscous fluid equations of motion, we have studied the mechanism of near fieldacoustic levitation. We have built theoretical model of gas squeeze film considering flexuralboundary condition, gas inertia and edge effect. Solving such nonlinear partial differentialequation, high resolution central scheme has been developed in numerical solutions, and approximate analytical solutions have been studied by equivalent method. By accounting theflexural mode shape of the vibrator, we have extended the applications of the theoreticalmodel. By accounting gas inertia and edge effect, accuracy of the model has been improvedgreatly. With high order solutions, our model can provide quantitative analysis for squeezefilms, including velocity and pressure distributions, levitation forces and driving forces.
We have built dynamic models of noncontact systems, including the coupling effect ofrail, gas film and levitated object. The relationship between traveling waves and forces hasbeen studied. Static and transient responses have been solved by finite differential method.According to velocity and pressure distributions of the gas film, we have calculated restoringforces and moments with small eccentric and inclination. Consequently we have discussedthe anti-disturb ability of the gas film generated by vibrators with different cross sections,which provide theoretical basis and optimization method for transducer design.
Piezoelectric transducers have strong electrical-mechanical coupling. The coupled FEAmodel with transducer and large surface vibrator has been built in this dissertation.Simulations have been performed to get mode shapes, amplitude distributions andimpedances, which are used for design of the driving part. The coupling has been proved bymeasurement. Moreover in simulations, dimension sensitivity on electrical-mechanicalcharacteristics has been discussed, which provide a general method for optimizingtransducers used in NFAL.
Finally, noncontact levitation and transportation systems have been built for experimentalresearches. To serve wafers of different size, we have set up two levitation device with tworadiuses, thus enhanced the contrast of different conditions and reliability of data. In thedesign of transportation systems, electrical and mechanical impedance matching has beendiscussed. Optimal matching program can be achieved by experimental debugging. Fortesting of dynamic performance during levitation and transportation, measuring systems havebeen built, which provide powerful data for comprehensive evaluation of noncontact systems. Compared with experimental data, our theoretical model has the highest precision, with erroraround5%. Good agreement with experiment enables the theoretical model to quantitativelyexplain the NFAL mechanism, predict dynamic response inside the squeeze film, and finallyhelp design the noncontact transportation systems effectively. Meanwhile, by large amount ofexperimental tests, key techniques of design and manufacturing have been concluded, forexample, precise requirements in dimensions to guarantee traveling wave generation andtransporting. At this point, it provides a theoretical foundation for practical applications.
引文
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