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物参共路干涉显微理论和实验研究
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摘要
干涉显微(Interference microscopy)是利用光波干涉和显微放大原理对微小物体表面或厚度分布进行非接触测量的光学手段。它为半导体芯片检测、光学微加工、光学检测、生物医学研究等领域提供了一种高分辨率、快速、非接触测量手段。本论文旨在探索抗振动性好、测量精度高、可以用于实时测量的干涉显微光路及方法,同时开展相应的相位再现算法的研究。本论文主要完成了以下工作:
     1.提出了一种物参共路的点衍射干涉显微光路。该光路利用一衍射光栅将物光分成两份,其中一份经过频谱面上的针孔滤波后变成参考光,另外一份仍被用作物光。当这两束光经过第二个光栅衍射后变成平行光束一同进入CCD。通过沿光栅矢量方向移动两个光栅中的其中一个可以实现相移。该光路具有以下优点:物参共路的光学结构降低了环境振动对干涉测量的影响;采用同轴光路提高了测量的空间分辨率。
     2.将相移技术与泽尼克相衬干涉显微相结合,实现了对微小物体相位的定量测量。采用一系列点状光源照明代替环状光源照明,并采用点状相位台阶来改变零频分量的相位。该方法降低了原来泽尼克相衬成像中的“光晕”现象。通过改变相位台阶的厚度来实现相移,可以对物体的相位进行定量测量。该方法具有稳定性好、横向分辨率高、相干噪声低的优点。
     3.提出了基于“平行分光+偏振相移”的同步相移方法。分别利用光栅和分光棱镜进行平行分光,结合偏振相移实现了同步相移。将构建的同步相移单元应用于干涉显微,通过单次曝光获得两幅或更多幅相移干涉图样,从而实现了对运动物体或动态过程的实时测量。
     4.提出了基于两个分光棱镜和针孔滤波实现同步相移点衍射干涉显微方法和装置。由于点衍射干涉显微装置具有物参共路的特点,该装置对环境振动不敏感。利用该光路进行了同步相移低载频离轴干涉显微实验,降低了离轴光路对CCD分辨率的要求。可以对运动物体或动态过程进行实时测量。
     5.提出了基于梯度积分的相位解包裹算法。该算法可以从单幅载频干涉图样或三幅相移干涉图样中直接解出被测相位的偏导数分布。然后通过对这两个相位偏导数积分从而得到“未包裹的”三维相位分布。该方法具有计算速度快、与干涉图样边缘无关等优点。
     6.提出了一种从相移干涉图样中直接获取相移量的计算方法。该方法首先利用衍射光波的统计特性,直接从三幅相移干涉图中计算出实验中的相移量,然后采用迭代算法使得再现出来的参考光不断均匀化,来进一步提高相移量的获取精度。该方法直接从干涉图样中获取相移量,无需额外测量;具有计算速度快,精度高等优点。
Interference microscopy, which combines optical interferometry and microscopy,is a whole-field optical technique for measuring profile, thickness or refractive indexdistribution of microscopic specimen. It has the advantages of nondestructive,high-resolution, high measurement speed, requiring no extra preparation on specimen.Thus, it has been widely used in biology, medical science, micro-fabrication industry,and so on. In this thesis, high-performance interference microscopy based oncommon-path configuration and parallel phase-shifting mechanism, as well as thecorresponding phase reconstruction algorithm are investigated. For these purposes, thefollowing works have been completed:
     1. A new common-path and in-line point-diffraction interferometer for quantitativephase microscopy is proposed. The magnified tested wave is split by a diffractiongrating into two copies. One copy is recast for reference wave through pin-holefiltered in the Fourier plane; the other one is still used as object wave. Afterdiffracted by the second grating, the two waves propagate on-axis into the CCDcamera. Achromatic phase-shifting is implemented by linearly moving one of thetwo gratings in grating vector direction. The setup has advantages of lesssensitive to environmental vibration due to the common-path configuration.
     2. Zernike phase contrast microscopy is extended to perform quantitative phasemeasurement for microscopic object by combining with the phase-shiftingtechnique. The extended microscopy uses dozens of periodic point-like lightsources on a ring for illumination, and corresponding point-like phase-shifters forphase retardering the undiffracted component of object wave. By shifting thephase shifters with different height (to cover the undiffracted components), thephase shifting can be performed. The method has low coherent noise level due tothe partially-coherent illumination. Besides, it has higher lateral resolutionbecause of the Synthetic-Aperture of the oblique illumination.
     3. The methods for simultaneous phase-shifting interferometry, which is based onparallel-beam-splitting and polarization phase-shifting, have been investigated. A diffraction grating pair or cube beam splitters are employed to perform theparallel-beam-splitting. Combined with polarization phase-shifting technique, theparallel phase-shifting unit is constructed. The unit has been incorporated intointerference microscopy. Two or more phase-shifting interferograms are obtainedthrough single exposure, thus moving object or dynamic process can be measuredwith this technique..
     4. A common-path and parallel phase-shifting point-diffraction interferencemicroscopy is proposed based on a cube beamsplitter pair. Together with theparallel phase-shifting scheme, slightly-off-axis interferometry for microscopy isperformed, which suppresses dc term by subtracting the two phase-shiftingholograms from each other. The setup is stable due to its common-pathconfiguration, and can be used for measuring moving object or dynamic process.
     5. A novel algorithm of phase reconstruction based on integral of phase gradient ispresent. The algorithm directly derives two real-valued partial derivatives fromthree phase-shifted interferograms. Through integrating the phase derivatives, thedesired phase is reconstructed. This algorithm is fast and easy to implement, andinsensitive to the nonuniformity of the intensity distribution of the interferogram.
     6. A simple algorithm for blind extraction of phase-shifts is proposed for from onlythree interferograms. Based on the statistical property of object wave, thealgorithm calculates approximately the involved phase-shifts as initial values.Then, the extraction is further improved by an iterative method, considering thefact that the closer the phase-shifts approach to their real values, the moreuniform the reconstructed reference wave will become. This method has theadvantages of fast extraction, no extra measurement, and high-precision.
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