自检测压电微传感器灵敏度优化及并行探测技术研究
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摘要
上世纪九十年代以来,锆钛酸铅(PZT)薄膜压电微悬臂梁在扫描探针显微技术中的应用,开启了压电微传感器在纳米探测领域的研究。由于PZT薄膜较高豹压电系数和机电耦合系数,基于PZT薄膜的压电微传感器集自驱动和和自检测为一体,在构建结构紧凑的并行工作系统方面具有独特优势,在高密度信息存储、并行加工等领域具有广阔的应用前景。然而高质量PZT压电薄膜的快速制备技术仍然是目前限制基于PZT薄膜的压电微传感器大规模工业化生产和实现商业化应用的主要因素;受到PZT薄膜性能和器件加工因素影响,压电微传感器的灵敏度仍有待提高;同时,在小型化和集成化过程中,器件尺寸的减小使压电微传感器的压电信号输出越来越微弱,给压电微传感器阵列的并行检测带来了困难。本文正是针对这一背景,围绕PZT压电薄膜微传感器的力探测和并行质量检测,在高质量PZT压电薄膜的快速制备、压电微传感器的灵敏度优化和微弱压电信号的并行检测技术等方面展开研究。
压电微传感器的灵敏度提高,依赖于PZT薄膜的性能提高、器件结构优化和加工技术。在高性能PZT薄膜的快速制备方面,我们研究了基于镍酸镧种子层的高性能PZT薄膜快速制备技术。以钙钛矿结构的LNO薄膜诱导PZT薄膜的择优取向生长,改善了快速热处理对PZT薄膜性能的影响。在器件结构优化和加工技术方面,从压电微悬臂梁的基本理论出发,分析了压电微传感器的结构参数与灵敏度的关系,研究了基于PZT薄膜的压电微传感器制备工艺,分析了工艺参数对器件性能的影响。以差动电荷放大电路为基础,研究了微弱压电信号的并行检测技术。并在此基础上,实现了压电微传感器的并行质量检测与图像扫描。
围绕自检测压电微传感器的灵敏度优化和并行探测技术,本博士论文完成的研究工作可以概括为以下几点:
(1)高性能PZT压电薄膜的快速制备与器件加工技术研究。以溶胶-凝胶法制备的钙钛矿结构的导电氧化物镍酸镧薄膜作为种子层,诱导PZT薄膜沿(100)晶向择优取向生长,抑制由于快速升温导致的PZT薄膜(111)晶向的产生,并利用快速热处理方法制备了介电性能与压电性能优异的PZT薄膜。这种方法兼顾了PZT压电薄膜的快速制备与性能改进,为PZT薄膜器件的批量制备提供了坚实基础。通过对器件加工技术的研究,掌握了影响PZT压电微传感器性能的关键工艺,总结了加工中常见的问题,为基于PZT压电薄膜的各种微传感器的加工制备提供了实验指导。
(2)微弱压电信号的检测技术。运用压电微悬臂梁相关理论,分析了高谐振频率的PZT压电微悬臂梁的信号特征。设计了差动电荷放大原理的检测电路,选取合适的运算放大器芯片,将微弱的压电信号变化提取并进行放大。重点分析了输出的噪声特征和产生机理,研究并实现了对噪声的抑制,有效的提高了电路的检测灵敏度。在此基础上,在自制的PZT压电性能测试系统上,对PZT压电微悬臂梁的频率特性和力-距离曲线进行了测量。
(3)基于PZT微悬臂梁的谐振式自检测微传感器阵列。在测量了PZT压电微悬臂梁的性能,分析了微悬臂梁阵列特征的基础上,对压电微传感器阵列的并行工作模式以及并行驱动-并行检测实现方法进行了研究。同时探讨了以PZT压电微悬臂梁阵列构建并行图像扫描系统中探针-样品逼近、位置调节等问题。最终,以自驱动-自检测的压电微传感器阵列为基础,构建了多探针的谐振式压电微传感器并行质量检测系统。该系统具有体积小、结构紧凑等优点。
(4)致动型PZT压电薄膜器件的加工与优化。对基于PZT压电薄膜的变形镜致动器的结构进行了分析,优化了结构参数和驱动方式。在致动器小型化的同时,使致动器在变形能力和驱动能力两个方面得到提高。改进了压电薄膜致动型全光纤相位调制器的数学模型,计算得到了压电系数以d_(31)对致动器性能的影响。利用该模型对基于PZT压电薄膜的全光纤相位调制器的结构进行了优化。利用溶胶-电雾化方法在光纤表面制备了PZT压电薄膜,并对薄膜的微观结构和表面质量进行了分析,为基于PZT压电薄膜的全光纤相位调制器的制备奠定了基础。
Piezoelectric PZT (Lead Zirconate Titanate) microcantilever, sensitive to nano-scale deflection, has been successfully used as self-sensing probes in SPM systems since 1990s. PZT film with high piezoelectric constant and electromechanical coupling coefficient, which is the key material of self-sensing and self-actuated piezoelectric microsensors, has shown the potential in constructing compact parallel detection systems such as ultra-high-density storage, parallel-fabrication plasma devices, et al. However, the preparation of high quality PZT thin film is rather time-consuming, which limits its mass production and commercial application. As the self-sensing function of piezoelectric microsensors is based on the detection of piezoelectric charge output of the PZT layer, it is necessary to enchance the sensitivity of miniaturized piezoelectric microsensors. Additionally, the difference between microsensors makes it difficult to realize parallel-driving and parallel-measuring. Therefore, we focused on the sensitivity enchancing and parallel detection technique with piezoelectric microsensors, and research on the rapid preparation of high quality PZT thin film, the fabrication of piezoelectric microsensors with optimized parameters, parallel detection technique of weak piezoelectric signal.
To enchance the performance of piezoelectric microsensors, the properties of PZT thin film and the parameters in fabrication should be enhanced and optimized. Perovskite LaNiO_3 film was introduced as the seed layer in PZT film preparation with rapid heat treatment. The relationship between sensitivity and structure parameters of piezoelectric microsensors was concluded from the basic microcantilever theory. The processing parameters in fabrication were studied. Differential charge amplifiers were modified for parallel detection. Self-sensing and self-actuated piezoelectric PZT microcantilever array for parallel-detection mass sensors with pictogram sensitivity was realized.
The research work of this dissertation can be summarized as follows: (1) Fast preparation of high performance PZT film and fabrication of PZT film based micro devices. Perovskite conductive oxide LNO films were prepared by Sol-Gel mothed as the seed layer to induce the growth of preferred (100) orientation of PZT films and reduce (111) orientation. Finally the acquired PZT films have good dielectric and piezoelectric property. Problems in the fabrication of PZT thin film based devices were presented, and key factors were emphasized.
(2) Detection and measurement of weak signals. Signal characteristics of high resonance frequency PZT cantilevers are analyzed with the theory of piezoelectric micro-cantilevers. Differential charge amplifier is used to extract and amplify the weak signal. Key factors that influencing the output of the amplifier are analyzed. By choosing appropriate operational amplifier chips and adding adjustable resistance and capacitance in the circuit, phase error is eliminated.
(3) Piezoelectric micro-sensor based resonant mass sensors array. To increase detection efficiency, parallel working system is contructed with the self-sensing and self-actuating PZT cantilevers. A number of key issues are investigated such as working mode, parallel exciting and parallel sensing mothed, probe-sample approach method and position adjustment. Additionally, micro piezoelectric PZT cantilevers working in liquid environment have been investigated.
(4) The fabrication and optimization of PZT thin film actuators. PZT thin film based deformable mirror actuators are analyzed. While miniaturized, it is optimized in deformable and driving ability. Mathematical model of piezoelectric all-fiber phase modulator was improved and effect of piezoelectric coefficient d_(31) was calculated. It is applied to the optimization of structure parameters of the modulator. Sol-ESD method is applied to prepare PZT thin films on the surface of optical fiber. It is suitable for nonplanar PZT thin film fabrication.
压电微传感器的灵敏度提高,依赖于PZT薄膜的性能提高、器件结构优化和加工技术。在高性能PZT薄膜的快速制备方面,我们研究了基于镍酸镧种子层的高性能PZT薄膜快速制备技术。以钙钛矿结构的LNO薄膜诱导PZT薄膜的择优取向生长,改善了快速热处理对PZT薄膜性能的影响。在器件结构优化和加工技术方面,从压电微悬臂梁的基本理论出发,分析了压电微传感器的结构参数与灵敏度的关系,研究了基于PZT薄膜的压电微传感器制备工艺,分析了工艺参数对器件性能的影响。以差动电荷放大电路为基础,研究了微弱压电信号的并行检测技术。并在此基础上,实现了压电微传感器的并行质量检测与图像扫描。
围绕自检测压电微传感器的灵敏度优化和并行探测技术,本博士论文完成的研究工作可以概括为以下几点:
(1)高性能PZT压电薄膜的快速制备与器件加工技术研究。以溶胶-凝胶法制备的钙钛矿结构的导电氧化物镍酸镧薄膜作为种子层,诱导PZT薄膜沿(100)晶向择优取向生长,抑制由于快速升温导致的PZT薄膜(111)晶向的产生,并利用快速热处理方法制备了介电性能与压电性能优异的PZT薄膜。这种方法兼顾了PZT压电薄膜的快速制备与性能改进,为PZT薄膜器件的批量制备提供了坚实基础。通过对器件加工技术的研究,掌握了影响PZT压电微传感器性能的关键工艺,总结了加工中常见的问题,为基于PZT压电薄膜的各种微传感器的加工制备提供了实验指导。
(2)微弱压电信号的检测技术。运用压电微悬臂梁相关理论,分析了高谐振频率的PZT压电微悬臂梁的信号特征。设计了差动电荷放大原理的检测电路,选取合适的运算放大器芯片,将微弱的压电信号变化提取并进行放大。重点分析了输出的噪声特征和产生机理,研究并实现了对噪声的抑制,有效的提高了电路的检测灵敏度。在此基础上,在自制的PZT压电性能测试系统上,对PZT压电微悬臂梁的频率特性和力-距离曲线进行了测量。
(3)基于PZT微悬臂梁的谐振式自检测微传感器阵列。在测量了PZT压电微悬臂梁的性能,分析了微悬臂梁阵列特征的基础上,对压电微传感器阵列的并行工作模式以及并行驱动-并行检测实现方法进行了研究。同时探讨了以PZT压电微悬臂梁阵列构建并行图像扫描系统中探针-样品逼近、位置调节等问题。最终,以自驱动-自检测的压电微传感器阵列为基础,构建了多探针的谐振式压电微传感器并行质量检测系统。该系统具有体积小、结构紧凑等优点。
(4)致动型PZT压电薄膜器件的加工与优化。对基于PZT压电薄膜的变形镜致动器的结构进行了分析,优化了结构参数和驱动方式。在致动器小型化的同时,使致动器在变形能力和驱动能力两个方面得到提高。改进了压电薄膜致动型全光纤相位调制器的数学模型,计算得到了压电系数以d_(31)对致动器性能的影响。利用该模型对基于PZT压电薄膜的全光纤相位调制器的结构进行了优化。利用溶胶-电雾化方法在光纤表面制备了PZT压电薄膜,并对薄膜的微观结构和表面质量进行了分析,为基于PZT压电薄膜的全光纤相位调制器的制备奠定了基础。
Piezoelectric PZT (Lead Zirconate Titanate) microcantilever, sensitive to nano-scale deflection, has been successfully used as self-sensing probes in SPM systems since 1990s. PZT film with high piezoelectric constant and electromechanical coupling coefficient, which is the key material of self-sensing and self-actuated piezoelectric microsensors, has shown the potential in constructing compact parallel detection systems such as ultra-high-density storage, parallel-fabrication plasma devices, et al. However, the preparation of high quality PZT thin film is rather time-consuming, which limits its mass production and commercial application. As the self-sensing function of piezoelectric microsensors is based on the detection of piezoelectric charge output of the PZT layer, it is necessary to enchance the sensitivity of miniaturized piezoelectric microsensors. Additionally, the difference between microsensors makes it difficult to realize parallel-driving and parallel-measuring. Therefore, we focused on the sensitivity enchancing and parallel detection technique with piezoelectric microsensors, and research on the rapid preparation of high quality PZT thin film, the fabrication of piezoelectric microsensors with optimized parameters, parallel detection technique of weak piezoelectric signal.
To enchance the performance of piezoelectric microsensors, the properties of PZT thin film and the parameters in fabrication should be enhanced and optimized. Perovskite LaNiO_3 film was introduced as the seed layer in PZT film preparation with rapid heat treatment. The relationship between sensitivity and structure parameters of piezoelectric microsensors was concluded from the basic microcantilever theory. The processing parameters in fabrication were studied. Differential charge amplifiers were modified for parallel detection. Self-sensing and self-actuated piezoelectric PZT microcantilever array for parallel-detection mass sensors with pictogram sensitivity was realized.
The research work of this dissertation can be summarized as follows: (1) Fast preparation of high performance PZT film and fabrication of PZT film based micro devices. Perovskite conductive oxide LNO films were prepared by Sol-Gel mothed as the seed layer to induce the growth of preferred (100) orientation of PZT films and reduce (111) orientation. Finally the acquired PZT films have good dielectric and piezoelectric property. Problems in the fabrication of PZT thin film based devices were presented, and key factors were emphasized.
(2) Detection and measurement of weak signals. Signal characteristics of high resonance frequency PZT cantilevers are analyzed with the theory of piezoelectric micro-cantilevers. Differential charge amplifier is used to extract and amplify the weak signal. Key factors that influencing the output of the amplifier are analyzed. By choosing appropriate operational amplifier chips and adding adjustable resistance and capacitance in the circuit, phase error is eliminated.
(3) Piezoelectric micro-sensor based resonant mass sensors array. To increase detection efficiency, parallel working system is contructed with the self-sensing and self-actuating PZT cantilevers. A number of key issues are investigated such as working mode, parallel exciting and parallel sensing mothed, probe-sample approach method and position adjustment. Additionally, micro piezoelectric PZT cantilevers working in liquid environment have been investigated.
(4) The fabrication and optimization of PZT thin film actuators. PZT thin film based deformable mirror actuators are analyzed. While miniaturized, it is optimized in deformable and driving ability. Mathematical model of piezoelectric all-fiber phase modulator was improved and effect of piezoelectric coefficient d_(31) was calculated. It is applied to the optimization of structure parameters of the modulator. Sol-ESD method is applied to prepare PZT thin films on the surface of optical fiber. It is suitable for nonplanar PZT thin film fabrication.
引文
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