微小型加速度计的精密装配及影响性能的因素研究
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摘要
加速度计是惯性导航和制导系统中的核心元件之一,其性能是决定导航、制导精度最重要的因素。由于高性能微小型加速度计的装配一直采用人工装配的方式,导致产品特级率低、生产效率低、工人劳动强度大,无法满足高性能微小型加速度计的批量化生产要求。本文以微小型挠性加速度计为研究对象,对微小型加速度计的精密装配技术及装配过程中的不确定因素对性能的影响规律进行了研究。
根据挠性加速度计的结构特点和工作原理,建立了加速度计的输入输出理论模型,结合对加速度计装配过程的分析,确定了加速度计的偏值误差主要由三种干扰输入引起,即干扰力矩△M,弹性恢复角β和电容差△C。分析了三种干扰输入对偏值误差的影响机理,确定引起偏值误差的主要装配不确定因素是导电游丝引起的干扰力矩△M,以及热膨胀系数不匹配导致摆片产生变形形成的电容差△C。分析了加速度计非线性误差和交叉耦合误差产生的机理,确定了摆组件的装配误差以及摆组件的重心偏移分别是引起加速度计交叉耦合误差和非线性误差的主要原因。对加速度计的偏值稳定性进行了理论分析,确定了导电游丝引起的干扰力矩△M、摆片不均匀变形引起的电容差△C的稳定性,及预紧力不稳定所引起的电容极板间隙变化是加速度计偏值稳定性的主要影响因素。
采用有限元方法量化分析了导电游丝在焊接装配过程中的变形所引起的偏值误差及其稳定性,针对游丝的焊接工艺提出改进方法。对热膨胀系数不匹配导致的摆片变形及其引起的偏值误差进行了有限元分析,研究了摆片变形所引起偏值的温度稳定性,针对摆组件的胶粘接工艺提出了改进方法。通过建立几何误差与交叉轴灵敏度间的数学关系,以及对加速度计零组件的加工、装配过程的分析,对加速度计的加工与装配提出了合理的公差要求。
以Majumdar-Bhushan模型中的假设条件为基础,建立了电容传感器的极板接触刚度模型。分析了预紧力对平行极板电容的影响,并进行了实验研究。针对加速度计的微小型螺纹副联接,提出采用零刚度碟簧提高螺纹副预紧力稳定性的方法,对不同尺寸的单片碟簧和组合碟簧的刚度特性进行了有限元分析,建立了实验装置进行对比实验研究。针对具有零刚度特性螺纹副的装配提出了一种改进的扭矩控制方法,实现了加速度计微小型螺纹副装配中对预紧力的有效控制,建立了微小型螺纹副装配实验装置,并进行了实验研究。
根据微小型挠性加速度计的结构特点和装配工艺要求,遵循实用、可靠、可重构的原则研制了基于显微机器视觉的精密自动装配系统。提出了局部特征拼接定位方法,实现了跨尺度微小型零件的显微视觉测量；提出了一种基于图像质量分析的光强自动控制方法,实现了光强自动调节；采用位置和阻抗混合控制策略,实现了摆组件装配过程中微小装配力的精确控制。随机抽取多套加速度计零件进行装配实验,验证了装配系统的可靠性和装配精度。
本文关于微小型加速度计的精密装配及性能影响因素的研究,包括：影响加速度计性能的装配不确定因素及其影响机理,微小型挠性加速度计自动化精密装配系统等研究成果,已在微小型挠性加速度计的装配生产中得到了应用。
As one of the key devices of the inertial navigation and inertial guidance system, accele-rometers have great influence on the performance and navigation accuracy. High performance miniature accelerometers assembled manually, and that results in some problems, such as low quality rate, low efficiency and high labor intensity. Therefore, the manual way is unsuitable for mass-production of high performance miniature devices. In this thesis, the precision as-sembly technology and the uncertain factors in the assembly process were studied on basis of the miniature flexure accelerometer.
According to the structural characteristics and the operational principle of the miniature flexure accelerometer, the mathematical model of input-output was constructed. Based on the model, and the analysis of assembly process, it was found that the bias error of the accelero-meter was mainly influenced by three kinds of disturbance inputs, including the disturbance torque AM, elastic recovery angleβand capacitor error△C. The influence mechanisms of the disturbance inputs were analyzed, and it was found that the disturbance torque AM caused by the conductive floating threads, the capacitor error△C caused by the distortion of the pendu-lum chip were the main factors influencing the bias error of the accelerometer. The assembly error and the shift of centre-of-gravity of the pendulum part were the main factors that leaded to the cross-coupled errors and nonlinear errors, respectively. The stability of accelerometer bias was analyzed theoretically. It was concluded that there were three factors which influ-enced the stability of the accelerometer bias greatly, including the stability of disturbance torque AM caused by the conductive floating threads, the stability of capacitor error△C caused by the distortion of the pendulum chip, and the change of the gap between the elec-trodes of capacitor, which is induced by the unstable preload.
Finite-Element-Method was used to analyze the bias error caused by the deformation of the conductive floating threads in the process of welding, and the temperature stability of the bias error. According to the analytical results, the welding processing method was optimized. According to the analysis of the bias error and the distortion of the pendulum chip caused by the mismatched thermal expansion coefficient, the adhesive joining technique was improved. By establishing the mathematical relationship between the geometric error and the cross-coupled sensitivity, and analyzing the machining and assembly process of the accele- rometer and its parts, reasonable tolerance requirements for the machining and assembly were proposed.
The contact stiffness model between the electrode plates of the capacitance was estab-lished on basis of the assumptions of the Majumdar-Bhushan model. Both of the theoretical analysis and the experiments were carried out to demonstrate the influence of the preload on the capacitance between the parallel-plate electrodes. As to the miniature bolt joints of the accelerometer, disc springs with zero stiffness characteristics were used to improve the stabil-ity of the bolt joints preload. FEM was employed to analyze the stiffness characteristics of the combined disc springs and the single disc springs with different sizes. The experiments were conducted to verify the results of FEM analysis. According to the assembly of the miniature bolt joints with zero stiffness characteristics, an improved torque method for preload control was proposed, which can be used to control the preload in the miniature bolt joints assembly of the accelerometer. Assembly experiments were performed for demonstration with the de-veloped experimental setup.
An automatic assembly system based on microscopic machine vision was developed to meet the requirements on the structural characteristic and the assembly process of the minia-ture flexure accelerometer. According to trans-scales miniature parts measurement by using microscopic vision, a local feature splicing positioning method was proposed. Based on the analysis of the image quality, a light controlling method was proposed to regulate the light intensity automatically. The mixed control strategy of position and impedance was adopted for precisely control of the micro assembly force in the assembly process of the pendulum component. Finally, assembly experiments on multiple randomly selected sets of parts were conducted to verify the reliability and the precision of the assembly system.
The research works in this paper are about the precision assembly of miniature accele-rometers and its influencing factors of performance. The research results include uncertain factors in the assembly process and the mechanisms influencing on the performance of acce-lerometers, and the automatic assembly system for the miniature flexure accelerometers. All the research results have been applied in the assembly production of the miniature flexure ac-celerometers.
根据挠性加速度计的结构特点和工作原理,建立了加速度计的输入输出理论模型,结合对加速度计装配过程的分析,确定了加速度计的偏值误差主要由三种干扰输入引起,即干扰力矩△M,弹性恢复角β和电容差△C。分析了三种干扰输入对偏值误差的影响机理,确定引起偏值误差的主要装配不确定因素是导电游丝引起的干扰力矩△M,以及热膨胀系数不匹配导致摆片产生变形形成的电容差△C。分析了加速度计非线性误差和交叉耦合误差产生的机理,确定了摆组件的装配误差以及摆组件的重心偏移分别是引起加速度计交叉耦合误差和非线性误差的主要原因。对加速度计的偏值稳定性进行了理论分析,确定了导电游丝引起的干扰力矩△M、摆片不均匀变形引起的电容差△C的稳定性,及预紧力不稳定所引起的电容极板间隙变化是加速度计偏值稳定性的主要影响因素。
采用有限元方法量化分析了导电游丝在焊接装配过程中的变形所引起的偏值误差及其稳定性,针对游丝的焊接工艺提出改进方法。对热膨胀系数不匹配导致的摆片变形及其引起的偏值误差进行了有限元分析,研究了摆片变形所引起偏值的温度稳定性,针对摆组件的胶粘接工艺提出了改进方法。通过建立几何误差与交叉轴灵敏度间的数学关系,以及对加速度计零组件的加工、装配过程的分析,对加速度计的加工与装配提出了合理的公差要求。
以Majumdar-Bhushan模型中的假设条件为基础,建立了电容传感器的极板接触刚度模型。分析了预紧力对平行极板电容的影响,并进行了实验研究。针对加速度计的微小型螺纹副联接,提出采用零刚度碟簧提高螺纹副预紧力稳定性的方法,对不同尺寸的单片碟簧和组合碟簧的刚度特性进行了有限元分析,建立了实验装置进行对比实验研究。针对具有零刚度特性螺纹副的装配提出了一种改进的扭矩控制方法,实现了加速度计微小型螺纹副装配中对预紧力的有效控制,建立了微小型螺纹副装配实验装置,并进行了实验研究。
根据微小型挠性加速度计的结构特点和装配工艺要求,遵循实用、可靠、可重构的原则研制了基于显微机器视觉的精密自动装配系统。提出了局部特征拼接定位方法,实现了跨尺度微小型零件的显微视觉测量；提出了一种基于图像质量分析的光强自动控制方法,实现了光强自动调节；采用位置和阻抗混合控制策略,实现了摆组件装配过程中微小装配力的精确控制。随机抽取多套加速度计零件进行装配实验,验证了装配系统的可靠性和装配精度。
本文关于微小型加速度计的精密装配及性能影响因素的研究,包括：影响加速度计性能的装配不确定因素及其影响机理,微小型挠性加速度计自动化精密装配系统等研究成果,已在微小型挠性加速度计的装配生产中得到了应用。
As one of the key devices of the inertial navigation and inertial guidance system, accele-rometers have great influence on the performance and navigation accuracy. High performance miniature accelerometers assembled manually, and that results in some problems, such as low quality rate, low efficiency and high labor intensity. Therefore, the manual way is unsuitable for mass-production of high performance miniature devices. In this thesis, the precision as-sembly technology and the uncertain factors in the assembly process were studied on basis of the miniature flexure accelerometer.
According to the structural characteristics and the operational principle of the miniature flexure accelerometer, the mathematical model of input-output was constructed. Based on the model, and the analysis of assembly process, it was found that the bias error of the accelero-meter was mainly influenced by three kinds of disturbance inputs, including the disturbance torque AM, elastic recovery angleβand capacitor error△C. The influence mechanisms of the disturbance inputs were analyzed, and it was found that the disturbance torque AM caused by the conductive floating threads, the capacitor error△C caused by the distortion of the pendu-lum chip were the main factors influencing the bias error of the accelerometer. The assembly error and the shift of centre-of-gravity of the pendulum part were the main factors that leaded to the cross-coupled errors and nonlinear errors, respectively. The stability of accelerometer bias was analyzed theoretically. It was concluded that there were three factors which influ-enced the stability of the accelerometer bias greatly, including the stability of disturbance torque AM caused by the conductive floating threads, the stability of capacitor error△C caused by the distortion of the pendulum chip, and the change of the gap between the elec-trodes of capacitor, which is induced by the unstable preload.
Finite-Element-Method was used to analyze the bias error caused by the deformation of the conductive floating threads in the process of welding, and the temperature stability of the bias error. According to the analytical results, the welding processing method was optimized. According to the analysis of the bias error and the distortion of the pendulum chip caused by the mismatched thermal expansion coefficient, the adhesive joining technique was improved. By establishing the mathematical relationship between the geometric error and the cross-coupled sensitivity, and analyzing the machining and assembly process of the accele- rometer and its parts, reasonable tolerance requirements for the machining and assembly were proposed.
The contact stiffness model between the electrode plates of the capacitance was estab-lished on basis of the assumptions of the Majumdar-Bhushan model. Both of the theoretical analysis and the experiments were carried out to demonstrate the influence of the preload on the capacitance between the parallel-plate electrodes. As to the miniature bolt joints of the accelerometer, disc springs with zero stiffness characteristics were used to improve the stabil-ity of the bolt joints preload. FEM was employed to analyze the stiffness characteristics of the combined disc springs and the single disc springs with different sizes. The experiments were conducted to verify the results of FEM analysis. According to the assembly of the miniature bolt joints with zero stiffness characteristics, an improved torque method for preload control was proposed, which can be used to control the preload in the miniature bolt joints assembly of the accelerometer. Assembly experiments were performed for demonstration with the de-veloped experimental setup.
An automatic assembly system based on microscopic machine vision was developed to meet the requirements on the structural characteristic and the assembly process of the minia-ture flexure accelerometer. According to trans-scales miniature parts measurement by using microscopic vision, a local feature splicing positioning method was proposed. Based on the analysis of the image quality, a light controlling method was proposed to regulate the light intensity automatically. The mixed control strategy of position and impedance was adopted for precisely control of the micro assembly force in the assembly process of the pendulum component. Finally, assembly experiments on multiple randomly selected sets of parts were conducted to verify the reliability and the precision of the assembly system.
The research works in this paper are about the precision assembly of miniature accele-rometers and its influencing factors of performance. The research results include uncertain factors in the assembly process and the mechanisms influencing on the performance of acce-lerometers, and the automatic assembly system for the miniature flexure accelerometers. All the research results have been applied in the assembly production of the miniature flexure ac-celerometers.
引文
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