多自由度误差同时测量中滚转角高精度测量方法的研究
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摘要
激光多自由度同时测量是机械制造、检测及仪器仪表等众多行业共同关注的问题,也是目前未能很好解决的测量难题之一,而其中的一个主要难点就是滚转角的高精度测量。本论文重点研究适用于多自由度误差同时测量的滚转角高精度光学测量方法,提出了三种不同的测量方法,搭建了相应测量装置,进行了实验研究,验证了所提测量方法的可行性。在此基础上,提出了对应的激光多自由度同时测量方案。
概括起来论文的主要工作和创造性主要体现在以下几个方面：
1.提出了一种基于光栅的滚转角测量方法。采用一维平面透射光栅作为敏感元件,以准直激光束方向为基准,利用±1级衍射双光路差动测量。该方法具有靶镜体积小,测量光路结构简单等优点。
2.提出了一种基于直角棱镜的滚转角测量方法。采用镀有分束膜的直角棱镜作为敏感元件,以准直激光束空间位置为基准,利用直角棱镜分束产生的平行双光束进行差动测量。
3.提出了一种基于五角棱镜的滚转角测量方法。利用一对五角棱镜产生平行双光束,采用一对角锥棱镜作为测量敏感元件,以准直激光束空间位置为基准,利用五角棱镜产生的平行双光束进行差动测量。在此基础上,提出了一种两倍提高测量分辨率且测量双光路实现共路的改进方案。
4.搭建对应的三种滚转角测量装置,理论分析和实验验证了这些方法的有效性。理论分析表明：以上三种测量方法均可实现滚转角误差与直线度、俯仰角及偏摆角等误差之间的分离,从而提高了测量的抗干扰能力；详细分析了双光束平行性误差对测量的影响,在此基础上,提出一种通过实验标定高精度测量平行双光束的角度误差进而实现补偿的方法,并在实验中验证了其有效性。
The study of multi-degree-of-freedom errors measurement methods and techniques has already become a common concern in many fields such as mechanical manufacturing and instruments, and it is also a difficult measurement problem that has been not yet solved properly, especially for roll measurement.
Based on analyzing the relevant references home and abroad, the optical measurement methods for roll error are studied in details in this dissertation, several optical methods for roll error of machine tool are put forward, and the corresponding systems are developed, the reliability of the methods and the systems are verified through a variety of experiments and the research work. Furthermore, based on a FDMS, several corresponding optical methods for simultaneously measuring multi-degree-of-freedom errors are put forward.
The innovative research achievements achieved in the dissertation are as follows:
1. A novel roll measurement method based on a one-dimensional grating is presented. In this method, a grating is used as an element for measuring the roll, and the direction of the collimated laser is used as the reference, and the differential measurement based on the±1order diffractive beams is adopted. This method is characterized by simple structure and small target.
2. A novel roll measurement method based on a rectangular-prism is presented. A rectangular-prism with splitting film is used as an element for measuring the roll. The spatial position of the collimated laser is used as the reference and the differential measurement is adopted based on two parallel beams coming from the rectangular-prism.
3. A novel roll measurement method based on the pentagonal prisms and retro-reflectors is presented. In this method, the measuring beam is splitted into two parallel beams by a pair of pentagonal prisms and a pair of retro-reflectors is used as the element for measuring the roll. The spatial position of the collimated laser is used as the reference and the differential measurement is adopted based on two parallel beams. Furthermore, an improved method with double measurement resolution and common-path structrue is put forward.
4. The systems based on the above three methods are developed and the feasibility of the systems is verified by theoretical analysis and experiments. Theoretical analysis shows that error separation can be realized in the above three methods and the anti-interference ability of the system can be enhanced. The influence of the parallelism error is analyzed and discussed in detail. Due to the feature of error separation, a parallelism error measurement method adopting calibration method is put forward and applied in measurement experiments.
概括起来论文的主要工作和创造性主要体现在以下几个方面：
1.提出了一种基于光栅的滚转角测量方法。采用一维平面透射光栅作为敏感元件,以准直激光束方向为基准,利用±1级衍射双光路差动测量。该方法具有靶镜体积小,测量光路结构简单等优点。
2.提出了一种基于直角棱镜的滚转角测量方法。采用镀有分束膜的直角棱镜作为敏感元件,以准直激光束空间位置为基准,利用直角棱镜分束产生的平行双光束进行差动测量。
3.提出了一种基于五角棱镜的滚转角测量方法。利用一对五角棱镜产生平行双光束,采用一对角锥棱镜作为测量敏感元件,以准直激光束空间位置为基准,利用五角棱镜产生的平行双光束进行差动测量。在此基础上,提出了一种两倍提高测量分辨率且测量双光路实现共路的改进方案。
4.搭建对应的三种滚转角测量装置,理论分析和实验验证了这些方法的有效性。理论分析表明：以上三种测量方法均可实现滚转角误差与直线度、俯仰角及偏摆角等误差之间的分离,从而提高了测量的抗干扰能力；详细分析了双光束平行性误差对测量的影响,在此基础上,提出一种通过实验标定高精度测量平行双光束的角度误差进而实现补偿的方法,并在实验中验证了其有效性。
The study of multi-degree-of-freedom errors measurement methods and techniques has already become a common concern in many fields such as mechanical manufacturing and instruments, and it is also a difficult measurement problem that has been not yet solved properly, especially for roll measurement.
Based on analyzing the relevant references home and abroad, the optical measurement methods for roll error are studied in details in this dissertation, several optical methods for roll error of machine tool are put forward, and the corresponding systems are developed, the reliability of the methods and the systems are verified through a variety of experiments and the research work. Furthermore, based on a FDMS, several corresponding optical methods for simultaneously measuring multi-degree-of-freedom errors are put forward.
The innovative research achievements achieved in the dissertation are as follows:
1. A novel roll measurement method based on a one-dimensional grating is presented. In this method, a grating is used as an element for measuring the roll, and the direction of the collimated laser is used as the reference, and the differential measurement based on the±1order diffractive beams is adopted. This method is characterized by simple structure and small target.
2. A novel roll measurement method based on a rectangular-prism is presented. A rectangular-prism with splitting film is used as an element for measuring the roll. The spatial position of the collimated laser is used as the reference and the differential measurement is adopted based on two parallel beams coming from the rectangular-prism.
3. A novel roll measurement method based on the pentagonal prisms and retro-reflectors is presented. In this method, the measuring beam is splitted into two parallel beams by a pair of pentagonal prisms and a pair of retro-reflectors is used as the element for measuring the roll. The spatial position of the collimated laser is used as the reference and the differential measurement is adopted based on two parallel beams. Furthermore, an improved method with double measurement resolution and common-path structrue is put forward.
4. The systems based on the above three methods are developed and the feasibility of the systems is verified by theoretical analysis and experiments. Theoretical analysis shows that error separation can be realized in the above three methods and the anti-interference ability of the system can be enhanced. The influence of the parallelism error is analyzed and discussed in detail. Due to the feature of error separation, a parallelism error measurement method adopting calibration method is put forward and applied in measurement experiments.
引文
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