基于光纤激光器自混合干涉的位移测量技术研究
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摘要
激光自混合干涉基于外部光反馈效应,激光器输出的光被外部物体反射或散射后,其中一部分光又耦合回激光器的谐振腔,反馈光携带了外部物体的信息,与腔内光相混合后,调制激光器输出功率及输出频率,形成自混合干涉。由于自混合干涉具有结构简单、易于准直及灵敏度高等优点,可用于速度、位移、距离及振动等物理量的精密测量,从而形成了一门新的技术。
首先研究了光纤激光器自混合干涉理论,运用了四镜腔模型阐述了线形腔光纤激光器自混合干涉效应的基本原理,获得了光反馈条件下激光器输出功率及输出频率的数学表达式,对不同反馈水平下的自混合干涉信号进行了理论分析与数值模拟,探讨了实验参数对自混合干涉信号输出波形的影响。研究了环形腔光纤激光器自混合干涉的基本理论,设计了基于光纤激光器的自混合干涉测量系统,实验验证了理论分析的结果。
应用光纤激光器的自混合干涉效应对微位移的测量方法进行了研究。为了提高自混合干涉的微位移测量精度,将正弦相位调制方法引入光纤激光器自混合干涉测量技术中。在光纤激光器外腔中使用电光晶体相位调制器或光纤压电相位调制器调制自混合干涉信号。研究了两种基于正弦相位调制自混合干涉信号的高精度相位解调方法：频域谐波分析技术及时域四象限积分技术。文中对两种解调方法分别给出了理论分析的结果,并对测量过程中主要的误差来源及其对测量精度的影响进行了分析。分别搭建了基于线形腔光纤激光器和环形腔光纤激光器的实验系统,对外反射靶面的微米级动态位移进行了重构,微位移重构的最大误差分别为V20和λ/15。59868
为提高位移测量范围,开展了光纤激光器自混合干涉合成波长法的研究,从理论上探讨了自混合干涉合成波长法进行位移测量的方法,并进行了原理性实验。
The laser self-mixing interference (SMI) is based on the external optical feedback effect. When a portion of light emitted from a laser source is reflected or scattered back into the laser cavity by an external target, the feedback light which carries information of the external target will mix with the light inside the cavity, causing a modulation of both the optical output power and lasing frequency. The self-mixing interferometric system has a lot of advantages such as inherent compactness, easy to collimate and high sensitivity. The SMI is able to achieve precision measurement of many physical quantities, such as velocity, displacement, distance and vibration, and it becomes a novel kind of powerful metrological tool.
The basic theory of SMI based on the fiber laser has been studied. The principle of the linear cavity fiber laserf SMI effect has been demonstrated through the four mirror cavity model. The optical output power and frequency has been deduced and the behavior of a laser under different optical feedback conditions have been analyzed and simulated as well. The influence of the experimental parameters on the shape of the SMI signal has been discussed in detail. Furthermore, the theory of SMI in the fiber ring laser has been studied. And the measurement system based on the SMI in the fiber lasers have been developed to validate the theoretical analysis.
The application of the fiber laser SMI in micro-displacement measurment is presented. In order to improve the displacement measurement accuracy of the interferometer, sinusoidal phase modulation method is introduced into the SMI system. The SMI signal is modulated by an electro-optic modulator or a fiber stretcher modulator in the external cavity. Two kinds of demodulation methods have been proposed. And the measurement principle based the fast Fourier transforms analysis and four-bucket integration technique has been demonstrated respectively. Error sources during the measurement and its influence on the measurement accuracy has been discussed and simulated. Experimentally, the fiber laser SMI system with phase modulation has been set up to reconstruct micro-displacement of the external target. The experimental results show that the displacement of target has been retrieved with high accuracy.
In order to enlarge the measurement range of the interferometer, the synthetic-wavelength method and self-mixing interference technique has been combined for large-scale displacement measurement. The measurement principle has been demonstrated and the experiments have been carried out.
首先研究了光纤激光器自混合干涉理论,运用了四镜腔模型阐述了线形腔光纤激光器自混合干涉效应的基本原理,获得了光反馈条件下激光器输出功率及输出频率的数学表达式,对不同反馈水平下的自混合干涉信号进行了理论分析与数值模拟,探讨了实验参数对自混合干涉信号输出波形的影响。研究了环形腔光纤激光器自混合干涉的基本理论,设计了基于光纤激光器的自混合干涉测量系统,实验验证了理论分析的结果。
应用光纤激光器的自混合干涉效应对微位移的测量方法进行了研究。为了提高自混合干涉的微位移测量精度,将正弦相位调制方法引入光纤激光器自混合干涉测量技术中。在光纤激光器外腔中使用电光晶体相位调制器或光纤压电相位调制器调制自混合干涉信号。研究了两种基于正弦相位调制自混合干涉信号的高精度相位解调方法：频域谐波分析技术及时域四象限积分技术。文中对两种解调方法分别给出了理论分析的结果,并对测量过程中主要的误差来源及其对测量精度的影响进行了分析。分别搭建了基于线形腔光纤激光器和环形腔光纤激光器的实验系统,对外反射靶面的微米级动态位移进行了重构,微位移重构的最大误差分别为V20和λ/15。59868
为提高位移测量范围,开展了光纤激光器自混合干涉合成波长法的研究,从理论上探讨了自混合干涉合成波长法进行位移测量的方法,并进行了原理性实验。
The laser self-mixing interference (SMI) is based on the external optical feedback effect. When a portion of light emitted from a laser source is reflected or scattered back into the laser cavity by an external target, the feedback light which carries information of the external target will mix with the light inside the cavity, causing a modulation of both the optical output power and lasing frequency. The self-mixing interferometric system has a lot of advantages such as inherent compactness, easy to collimate and high sensitivity. The SMI is able to achieve precision measurement of many physical quantities, such as velocity, displacement, distance and vibration, and it becomes a novel kind of powerful metrological tool.
The basic theory of SMI based on the fiber laser has been studied. The principle of the linear cavity fiber laserf SMI effect has been demonstrated through the four mirror cavity model. The optical output power and frequency has been deduced and the behavior of a laser under different optical feedback conditions have been analyzed and simulated as well. The influence of the experimental parameters on the shape of the SMI signal has been discussed in detail. Furthermore, the theory of SMI in the fiber ring laser has been studied. And the measurement system based on the SMI in the fiber lasers have been developed to validate the theoretical analysis.
The application of the fiber laser SMI in micro-displacement measurment is presented. In order to improve the displacement measurement accuracy of the interferometer, sinusoidal phase modulation method is introduced into the SMI system. The SMI signal is modulated by an electro-optic modulator or a fiber stretcher modulator in the external cavity. Two kinds of demodulation methods have been proposed. And the measurement principle based the fast Fourier transforms analysis and four-bucket integration technique has been demonstrated respectively. Error sources during the measurement and its influence on the measurement accuracy has been discussed and simulated. Experimentally, the fiber laser SMI system with phase modulation has been set up to reconstruct micro-displacement of the external target. The experimental results show that the displacement of target has been retrieved with high accuracy.
In order to enlarge the measurement range of the interferometer, the synthetic-wavelength method and self-mixing interference technique has been combined for large-scale displacement measurement. The measurement principle has been demonstrated and the experiments have been carried out.
引文
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