Oven升华物污染原因及防治研究
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摘要
针对热烘烤设备(Oven)升华物污染现象进行系统研究,确定升华物污染形成的原因,并找到有效的改善措施。首先通过对行业各厂升华物污染现象对比,然后将升华物污染量化,采用微粒测量仪对升华物粒子数量进行测量,最后采用压力测量仪对Oven炉正负压进行测试、以及电子压差计对Oven排气管道进行压差堵塞检测,对升华物污染的原因提出合理的解释,并给出有效的改善措施。结果表明,Oven升华物污染是由于Oven炉相对外界正压造成的,而Oven排气管道堵塞会加剧正压程度。通过降低炉的进气量、增加炉的排气量以及排气管道的疏通等方式可以极大避免升华物的污染。
This paper makes a systematic study on the phenomenon of sublimation pollution in hot baking equipment(Oven),determines the causes of sublimation pollution, and finds out effective improvement measures. First of all, through the comparison of the phenomenon of sublimation pollution in various factories in the industry, and then quantify the sublimation pollution, the particle measuring instrument is used to measure the number of sublimation particles. Finally, the pressure measuring instrument is used to test the positive and negative pressure of Oven furnace, and the electronic pressure difference meter is used to detect the differential pressure blockage of Oven exhaust pipe, which puts forward a reasonable explanation for the cause of sublimation pollution and gives effective improvement measures. The results show that the pollution of Oven sublimation is caused by the relative external positive pressure of Oven furnace, and the blockage of Oven exhaust pipe will aggravate the degree of positive pressure. The pollution of sublimation can be greatly avoided by reducing the air intake of the furnace, increasing the exhaust volume of the furnace and dredging the exhaust pipe.
This paper makes a systematic study on the phenomenon of sublimation pollution in hot baking equipment(Oven),determines the causes of sublimation pollution, and finds out effective improvement measures. First of all, through the comparison of the phenomenon of sublimation pollution in various factories in the industry, and then quantify the sublimation pollution, the particle measuring instrument is used to measure the number of sublimation particles. Finally, the pressure measuring instrument is used to test the positive and negative pressure of Oven furnace, and the electronic pressure difference meter is used to detect the differential pressure blockage of Oven exhaust pipe, which puts forward a reasonable explanation for the cause of sublimation pollution and gives effective improvement measures. The results show that the pollution of Oven sublimation is caused by the relative external positive pressure of Oven furnace, and the blockage of Oven exhaust pipe will aggravate the degree of positive pressure. The pollution of sublimation can be greatly avoided by reducing the air intake of the furnace, increasing the exhaust volume of the furnace and dredging the exhaust pipe.
引文
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[4]KISHIMOTOT,YAMAGATA H.Resin composition for color filters:US,6413686[P].2002-07-02.
[5]苏雷．光刻胶黏附力对MEMS工艺影响的研究[D]．天津：天津大学，2011.