摘要
太阳能硅片多线切割机是太阳能光伏产业链硅片生产流程中的关键设备,硅片加工质量的好坏将直接影响到后续的加工效率和成品率。多线切割以其高精度、高效率、低损耗的特点逐渐取代了传统的外圆和内圆切割成为硅棒切割加工的主要方式。多线切割是通过一根钢丝线的高速往复运动把磨料带入硅棒加工区域进行研磨切割,将待切割硅棒一次性同时切割成数百或数千片薄片的新型方法。太阳能硅片多线切割机的张力控制是关系到加上能否顺利进行和加工质量好坏的关键技术。钢丝线在切割过程中不允许断线,否则昂贵的硅棒将报废；钢丝线在切割过程中的抖动幅度和频度直接决定了硅片加工的质量；多线切割的上艺要求对于同一硅棒加工的不同阶段所要求的钢丝线张力也不相同。本文针对太阳能硅片多线切割机产品开发中的张力控制关键技术进行了深入全面的研究。
(1)研究太阳能硅片多线切割机和工业领域张力控制的国内外研究状况,阐述数控多线切割技术的发展趋势；依据项目要求,介绍太阳能硅片多线切割机张力控制理论基础,指出课题研究重点和攻克的难点；论述课题来源与作者承担的科研任务务以及本文主要研究内容。
(2)分析多线切割机的张力产生机理,设计多线切割机的总体结构,从机械结构和控制结构两个方面阐述多线切割机的特征；研究多线切割机放线张力、收线张力和切割张力三个子系统之间的关系；应用虎克定律,质量守恒定律以及电机轴的运动方程,建立多线切割机张力系统的数学模型,给出控制系统的原理框图。
(3)针对多线切割机的张力检测问题,提出基于观测器理论的张力检测新方法。通过多线切割机的数学模型得到张力估计值的误差方程,求出满足稳定性的参数条件,定义李亚普洛夫函数分析误差的收敛速度,通过加入补偿量提高误差的收敛速度,设计实现代数张力观测器,进一步通过引入符号函数提出改进的代数张力观测器,增强了张力估计的稳定性和可靠性,使用粒子群算法对补偿因子进行优化控制。仿真结果证明了该方法的可行性和正确性,该方法具有成本低,抗干扰性强,可靠性高的特点。
(4)提出基于滑模控制、模糊滑模控制和无模型自适应模糊滑模控制的直接张力控制方法。首先设计滑模控制器,它包括一个速度滑模控制器和两个张力滑模控制器,根据速度和张力误差值定义积分滑模面,采用符号函数趋近律方法,利用李亚普洛夫函数证明算法的稳定性,使用模糊控制优化趋近律系数,利用双曲正切函数代替符号函数,进一步改善系统的动态性能,有效减少滑模控制固有的高频抖动现象,然后再设计无模型自适应模糊滑模控制算法,使得系统具有更好的鲁棒性。对三种算法进行仿真实验,证明了所提方法的正确性。
(5)通过张力摆杆的受力分析建立运动方程,提出一种基于三轴同步的间接张力控制方法。以收放线电机和主电机为控制对象,定义三轴系统的跟踪误差和同步误差,引入相邻轴速度误差的概念,设计控制转矩满足电机的运动方程,使得相邻轴速度误差及其微分趋于零,实现三轴同步控制,采用李雅普诺夫函数证明算法的收敛性和稳定性,仿真结果表明该控制策略同步性高、稳定性好、收敛速度快。将该三轴算法推广到一般情况下,设计任意轴同步控制算法,通过李雅普诺夫函数证明该算法的收敛性和稳定性,在MATLAB中建立仿真模型,测试六轴的同步运动,检验算法的同步性能。
(6)根据太阳能硅片多线切割机的技术指标,设计开发张力控制系统,以自主研发的XQ600A多线切割机产品为应用平台,验证本文所提的各种张力控制策略,通过实验结果和数据的对比分析,总结各种张力控制方法的特点。通过实际切割硅棒测试了XQ600A多线切割机,结果表明该机型具有切割精度高,稳定性好的特点。
本课题成功开发一款XQ600A多线切割机产品,整机性能指标达到预期的设计目标,该机型已作为2011年新产品投入市场应用。本文研究的太阳能硅片多线切割机张力控制方法与核心技术,进一步丰富多线切割机张力控制的设计理论和技术体系,对数控多线切割机系列化装备的研制具有重要的参考价值和借鉴作用。
Multi-wire saw (MWS) for solar silicon wafer is the key equipment in the solar silicon wafer manufacturing process in photovoltaic(PV) industry. The processing quality will directly affect the following the processing efficiency and yield. MWS, which gradually replace the traditional outer circle and inner circle cutting, has become the mainstream of wafer slicing technique for large diameter thin wafer production in PV industry. It has advantages such as high productivity, minimum warp, uniform thickness, and low kerf loss. The principle of MWS is that the abrasive slurry is fed from a plate to the wire and is carried by the wire to the silicon ingot through high-speed reciprocating motion of a steel wire, and the silicon ingot is pushed against the moving wire web and sliced into hundreds of thousands of wafers of a thickness somewhere between180and280μm at the same time. Tension control of MWS for solar silicon wafer is key technology for quality and efficiency in slicing processes. For lower kerf loss of silicon materials, a thin steel wire, which varies in size from0.12to0.16mm in diameter, is used in MWS. If the wire tension is too large, it results in wire breakage. The processing is interrupted. A costly silicon ingot is discarded as useless. If the wire tension is not large enough, it causes wire to vibrate. The amplitude and frequency of wire vibration influence the warp and total thickness variation of a silicon wafer. And the technology of MWS require that the wire tension is not the same in different stages for the same silicon ingot processing. The key technologies on tension control of MWS product development for solar silicon wafer are deeply studied in the dissertation.
(1) The domestic and foreign study present situation of MWS for solar silicon wafer and tension control for industry field have been studied. The development trend of numerical control multi wire slice technology is described. According to the project requestment, the theory foundation have been deeply researched on tension control of MWS for solar silicon wafer. The research emphases and the conquered difficulties of the project have been pointed out. The project origin and project tasks undertaken by author are discussed. And main contents of this dissertation is given.
(2) Tension mechanism of MWS is analyzed. The overall structure of MWS is introduced. The characteristics of MWS is described from the mechanical structure and control structure two aspects. The relationship among three tension sub system, including supply spool tension, take-up spool tension and slice tension, are discussed. Mathematical model of MWS tension system is set up through using the principle of Hooke, the principle of mass conservation and motion equation of motor axis. And control block diagram is given.
(3) Aimed at the problem of tension detect for MWS, a new method of sensorless tension detect, which calculate tension by constructing a tension observer, is proposed. Tension estimation error equation are obtained through mathematical of MWS. And parameter stability conditions are gotten. The convergence speed of error is analyzed by defining Lyapunov function. The convergence speed of error is accelerated by the addition of compensation. So algebra tension observer is realized. Further by introducing the sign function, the improved algebraic tension observer is put forward. The stability and reliability of tension detect is enhanced and compensation factor is optimized by the use of particle swarm algorithm. The results of simulation verify the effectiveness and correctness of the proposed method. This method has characteristics such as low cost, strong anti-interference and high reliability.
(4) The direct tension control method are proposed based on sliding mode control, fuzzy sliding mode control and model-free adaptive fuzzy sliding mode control. The sliding controller, including a velocity sliding controller and two tension sliding controllers, are designed. Integral sliding surface is defined based on tension error and velocity error respectively. The sgn(x) function reaching law method is adopted. The stability of algorithm is proved through Lyapunov function. Reaching law coefficient is optimized through fuzzy control. And sgn(x) function is replaced by tanh(x) function. It improves the dynamic performance, minishes the chattering bringing by sliding mode control and tracks the desired tension quickly and accurately. Then the model-free adaptive fuzzy sliding mode control algorithm is designed by introduction of model-free adaptive control,which compensate uncertain or part time-varying parameters of system. It make system has better robustness. Simulation is carried out on three algorithms. The results verify effectiveness and correctness of the proposed method.
(5) The dynamic equation is established based on force analysis of the tension arm. The reasons of tension fluctuation are analyzed for MWS. A indirect tension control strategy is put forward based on three-axis synchronization. In this strategy, the supply/collect spool motor and main motor are considered the control objects. By defining the tracking error and the synchronization error for three-axis system, and introducing the speed error on the adjacent axis, A torque control scheme is designed based on the dynamic equations of the motor to make speed error and its derivative tend to zero, thus realizing three-axis synchronization. The convergence and stability of algorithm are proved by using Lyapunov function. Simulations show that this strategy provides the high synchronization precision, good stability and high convergence rate. Then the algorithm is extended to any number of axes under general conditions. Multi-axis synchronization control algorithm is designed. The convergence and stability are proved through Lyapunov function. Finally a simulation model is established in MATLAB to test the six-axis synchronization. Synchronization performance of the algorithm is verified.
(6) According to the technical specification of MWS for solar silicon wafer, the hardware platform of tension control system is designed. The proposed various tension control strategy is used in applied research. The characteristics of various tension control strategies is analyzed through experimental result and data. XQ600A MWS is tested through slicing silicon ingot. The experimental result proved that the MWS product has characteristics such as high slice precision and high stability.
XQ600A MWS product for solar silicon wafer is successfully developed. The sample machine completely meet the anticipated design requirements. At present as2011's new product, it has been put into market applications. The key technologies study on tension control of MWS for solar silicon wafer enrich the design theory and technology system of MWS tension control. It provides important reference value for developing MWS product.
引文
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