摘要
现代制造业的发展对三坐标测量机提出更高的速度和精度要求,特别是随着电子工业的发展,精度参数多为纳米级的微型仪器不断出现。本文以正在研制的新型纳米三坐标测量机为对象,在研究纳米三坐标测量机结构特征和受力分析基础上,对影响纳米三坐标测量机精度的主要误差源进行分析。根据纳米测量机的结构和精度要求,选用测量头和激光源分开的三光束平面反射激光干涉仪SP2000-TR设计误差分离装置,设计了纳米测量机各单项误差的分离方案,实现了测量机示值误差、角运动误差、直线度运动误差的一次性分离。研究基于速度瞬时中心的工作台导轨误差高精度分离方法,认为工作台实际瞬时中心是时变的,进行了工作台速度中心坐标和任意点的坐标误差的计算公式的理论推导,从理论上设计了基于运动瞬时中心的误差分离与修正方法。基于三次样条插值理论和双三次样条插值理论,以编程软件LabVIEW作为虚拟界面编程平台,编制误差曲线拟合程序和曲面拟合程序,为误差的修正提供软件基础。最后,从理论上说明如何对修正后的纳米三坐标测量机进行精度的评定。
Development of modern manufacturing has put forward higher speed and accuracy requirement for CMM.especially with the development of the electronics industry,more and more micro devices appearance. In this paper, the new Nano-CMM, which is being developed,is the object of the study.The influences of every error source of the precision of Nano-CMM is analysed On the basis of researching structure characteristic and force analysis of Nano CMM. According to the structure and accuracy demand of Nano CMM, error separation experiment equipment is composed of triple light beam plane reflection laser interferometer SP2000-TR with the departure of measuring head and laser source. Separation solution of each single error of Nano CMM is designed. One-time separation of indication error and linear error is realized. High-accuracy separation method of worktable guide error based on motion instant center is researched which considering that the actual rotating center is supposed to change with the time. The calculation formula of coordinate error of worktable speed center and random points are dedced theoretically and the corresponding error separation and correction method based on the speed instant center are designed theoretically. On the basis of cubic spline principle and double cubic spline function, the program software LabVIEW is used as software platform to program curve fitting and surface fitting of error,provide basic software for the error after amendment. Finally,How to assesst the accuracy of CMM after its error iscorrected is illustrated by the theory.
引文
[1] Choi Woncheol, et al. Sampling uncertainty in coordinate measurement data analysis. Precision Engineering.1998,22: 153-167.
[2] Farzan, et al. Coordinate measurement and inspect ion methods and apparatus. USA Patent:5198990,1998.
[3]张国雄,三坐标测量机,天津大学出版社,1999;
[4]王正强,三坐标测量机的发展现状,现代计量测试,1994,No.5,P.3～7;
[5]谢华锟,现代精密量仪现状及水平,现代切削与测量工程(国际)研讨会专题报告,2004.10;
[6] Lotze W. ScanMax: A novel 3D coordinate measuring machine for the shop2floor environment. Measurement. 1996, 8 (1):17- 25.
[7]付中正,叶东等.新型关节式三坐标测量机的研究.工具技术,1997,31(1):38-40.
[8]叶东,车仁生.仿人多关节坐标测量机的数学建模及其误差分析.哈尔滨工业大学学报,1999,31(2):28-32.
[9]叶东等.六自由度关节式坐标测量机关节零位偏差的标定算法.工具技术,1999, 33(4):34- 36.
[19]汪平平,费业泰,林慎旺.柔性三坐标测量臂精度的优化设计.应用科学学报,2006,24(4):410-414.
[11]高思田,王春艳,叶孝佑等.纳米技术与纳米计量.现代计量测试,2000,(1):3-12
[12]周兆英,叶雄天,崔天佑等.微纳米技术及微型机电系统.光学精密工程,1998,Vol6(1):1-7
[13]吴敏镜.从精密加工看计量技术的现状与发展.宇航计测技术,2000,Vo20(2):25-27
[14]曾令儒.二十一世纪的纳米技术.宇航计测技术,2000,Vo20(1):59-61
[15] Kramar J. Molecular measuring machine research and development. http: // www. mel. nist.gov/div821/webdocs-14/m3.pdf,2003
[16] K.C.Fan, S.H.Chang and T.Y.Chung,Development of a Micro-CMM for Nanometrology,Keynote Paper,Proc.of the Korean Precision Engineering Symposium,,Seoul,2001.05
[17]徐毅,高思田,王春艳等.微机械及纳米计量科学.中国机械工程,2000,Vol.11(3):272-274
[18]杨洪涛,费业泰,陈晓怀等.纳米三坐标测量机不确定度分析与精度设计.重庆大学学报,2006,Vol.29(8):82-86
[19] ISO 10360-1:2000. Geometrical product specifications (GPS) - Acceptance test and reverification test for coordinate measuring machines (CMM)– Part 1: Vocabulary
[20] ISO/WD 10360-7:2005. Geometical product specifications (GPS) - Acceptance test and reverification test for coordinate measuring machines (CMM) - Part7: CMMs equipped with video probing systems
[21] G.Belforte,B.Bona, et al.,Coordinate Measuring Machine and Machine Tools Selfcalibration and Error Correction,Annals of the CIRP,1977,25(1): 235-240
[22] Herreman G.Laser Measurement Systems for Machine Tool Testing.Technology of Machine Tools,1980,5
[23] Ni J.,et al.A Multi-Degree-of-Freedom Measuring System for CMM Geometric Errors.ASME Journal of Engineering for Industry,1992,114: 362-369
[24]洪迈生,魏元雷,李济顺,中国机械工程,2000,Vol.11,No.3,P.245～247;
[25]蔡萍,上海计量测试,2002,Vol.29,No.6,P.4～7;
[26]卫兵.纳米三坐标测量机主体机台及Z轴驱动系统的研究.安徽:合肥工业大学硕士论文,2006.
[27] Bosch J. A., Coordinate Measuring Machines and Systems, New York, USA: Marcel Dekker Inc, 1995;
[28] Bryan J., International Status of Thermal Error Research(1990), CIRP Annals, 1990, Vol.39, No.2, P.645～65
[29]王伟丽,范光照,刘玉圣.基于共平面二维工作平台的精密测量系统.中国吉林学院学报,2005,16(4):264-267
[30]林洪桦现代测量误差分析及数据处理,计量技术,1997,№6:41~45
[31] Uwe Brand, Juergen Kirchhoff. A micro-CMM with metrology frame for low uncertainty measurements,Messurement Science and Technolygy,2005,16:2489～2497
[32]王崎,合肥工业大学硕士论文,纳米三坐标测量机的精度设计与误差修正,2006;
[33]夏瑞雪,合肥工业大学硕士论文,纳米三坐标测量机误差分离方案的研究,2007;
[34]杨洪涛,合肥工业大学博士论文,坐标测量机误差建模与修正技术研究,2007;
[35]尹自强,李圣怡,王卓.直线度的高精度测量.计算机测量与控制,2004,12(2):110-113.