摘要
微驱动、定位技术是当今世界各国研究的热点问题,是纳米测量及加工技术中的关键技术之一,而微位移致动器则是微驱动、定位系统中的重要组成部分。压电陶瓷致动器是目前微位移技术中比较理想的驱动元件,它的出现开创了精度进入纳米级的新时代。
本文研究的课题是:回转式微动压电电动机及其驱动电源的研究。其主要内容和创新点包括:
1、系统地介绍了压电陶瓷的性能参数、压电元件等内容。
2、着重阐述了回转式微动压电电动机的运动原理、柔性铰链的基本概念、直圆单轴柔性铰链绕z轴的转动刚度、总体机械结构设计、驱动电源设计、控制系统设计以及性能测试实验。结构设计方面,采用压电微驱动器结合柔性铰链的结构,加大了推力和夹紧力,同时放大了压电晶体的位移,实现了单步微角度回转运动;根据尺蠖运动(Inchworm motion)原理,采用“推—拉”接力运动原理,配以适当的四路驱动信号,使压电电动机实现连续平稳的转动。系统控制方面,通过单片机系统产生四路信号,经驱动电源直流放大后加载到压电陶瓷微位移器上。控制程序采用C51软件编程,以中断方式实现波形控制。
3、对压电陶瓷驱动器电源的作用原理、设计特点及分类进行了介绍,并给出了压电陶瓷驱动器的电源设计要求、方法、电路及实验波形以及驱动能力测试实验数据。该电源放大倍数为63倍,输出电流60mA。同时对压电陶瓷进行的动态驱动实验表明,在输入三角波、方波等动态信号时,该驱动电源可以很好地跟随输入波形的变化,实现了输入电压为0～5V时,输出电压在0～280V范围内连续可调。具有1.575V的分辨率和较为理想的静特性。并且该电源在100KHz范围内具有良好的频响特性。该电源输出电压稳定,分辨率高,静态纹波低,动态性能好,同时PA85及其外围电路具有过压、过流、短路保护等功能。其电路结构简单,可靠性高,具有很高的实用价值。
4、实验结果表明:微角度压电电动机的运动位移是线性的,最小步距优于3",在160V的驱动电压下速度达到430.4"/s。
Micro-driving and positioning are one of the hottest research topics all over the world and the key of nano-measurement and nano-fabrication. Micro-displacement actuator is the important part of the system of micro-driving and micro-positioning. At present, piezoelectric ceramic actuator is relatively perfect driving element in micro-displacement technology. Its appearance inaugurates new times of precision of nanometer.
In this dissertation, study on the rotatory piezoelectric motor with micro-angle and its driving power. The main contents innovative points include:
1. Piezoelectric effect, piezoelectric equation and performance parameter of piezoelectric ceramic are introduced.
2. The principle of rotary piezoelectric motor, the basic conception of flexible joint, the running inflexibility of straight or round flexible joint, the mechanical structure design, the design of driving power, the controlling system and character testing experiments of piezoelectric micro-angle motor are expatiated in emphasis. In structure design, the structure of rotary motor model which adopts compliant mechanisms, not only increases thrust and clamp force, but also magnifies the displacement of piezoelectric ceramic. In this way, the micro-angle with single step comes true. With the principle of push-and-pull relay movement which is improved from the principle of inchworm motion and proper four-channel driving signals, PZT platform can move continuously and smoothly. As to controlling system, the four-channel signals from MCU are output to DC amplifier to be amplified and then loaded to PZT platform. The software is programmed with C51 and the period of waveform is controlled in the interrupt mode.
3. The principle, design point and sort of power supply of piezoelectric ceramic are also introduced. Design demand, method, circuit, experiment wave and testing parameters of power supply are given. In the design of power supply of PZT, the supply magnifies and stabilizes voltage directly, which has a amplification of 63 and the current is 60 mA. Experiments show that when input signals are dynamic, such as triangle wave or square wave, its output can follow input very well. The supply may adjust the voltage output continuously from 0～280V when the input ranges from 0V to 5V, with the resolution of 1.575V. The frequency response of the driving power is 100KHz. All these show that the power supply has a stable voltage output, with high
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