Ultrasensitive Pressure Detection of Few-Layer MoS₂

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• 作者：Feifan Yu ; Qianwen Liu ; Xin Gan ; Mingxiang Hu ; Tianyi Zhang ; Cheng Li ; Feiyu Kang ; Mauricio Terrones and Ruitao Lv
• 刊名：Advanced Materials
• 出版年：2017
• 出版时间：January 25, 2017
• 年：2017
• 卷：29
• 期：4
• 全文大小：2069K
• ISSN：1521-4095

文摘

Ultrasensitive pressure sensors are constructed with few-layer MoS₂ films. As-designed Fabry–Perot (F–P) sensors exhibit nearly synchronous pressure–deflection responses with a very high sensitivity (89.3 nm Pa⁻¹), which is three orders of magnitude higher than those of conventional diaphragm materials (e.g., silica, silver films). This kind of F–P sensor may open up new avenues for 2D materials in biomedical and environmental applications.