Ultrasensitive Pressure Detection of Few-Layer MoS<sub>2sub>

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• 作者：Feifan Yu ; Qianwen Liu ; Xin Gan ; Mingxiang Hu ; Tianyi Zhang ; Cheng Li ; Feiyu Kang ; Mauricio Terrones and Ruitao Lv
• 刊名：Advanced Materials
• 出版年：2017
• 出版时间：January 25, 2017
• 年：2017
• 卷：29
• 期：4
• 全文大小：2069K
• ISSN：1521-4095

文摘

Ultrasensitive pressure sensors are constructed with few-layer MoS<sub>2sub> films. As-designed Fabry&ndash;Perot (F&ndash;P) sensors exhibit nearly synchronous pressure&ndash;deflection responses with a very high sensitivity (89.3 nm Pa<sup>&minus;1sup>), which is three orders of magnitude higher than those of conventional diaphragm materials (e.g., silica, silver films). This kind of F&ndash;P sensor may open up new avenues for 2D materials in biomedical and environmental applications.