Helium Ion Microscope Fabrication Causing Changes in the Structure and Mechanical Behavior of Silicon Micropillars

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• 作者：Yue-Cun Wang ; Lin Tian ; Fan Liu ; Yuan-Bin Qin ; Gong Zheng ; Jing-Tao Wang ; Evan Ma and Zhi-Wei Shan
• 刊名：Small
• 出版年：2017
• 出版时间：January 4, 2017
• 年：2017
• 卷：13
• 期：1
• 全文大小：1515K
• ISSN：1613-6829

文摘

Silicon is used as a prominent case to demonstrate the dramatic effects of helium ion microscope nanofabrication. Structurally, a submicrometer Si pillar can turn completely amorphous at He⁺ doses typically used for micromachining, forming nanobubbles at higher doses. In terms of mechanical properties, the flow stress decreases markedly with increasing dosage, and the softened amorphous Si exhibits spread-out plastic flow.