Neutron reflectometry study of CrAlN/TiAlN nanostructured multilayers

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• 作者：Xiaoming Du ; Minpeng Wang ; Yan Wang ; Xinxi Li ; Zhong Zhang ; Gang Zhang ; Chaoqiang Huang and Erdong Wu
• 刊名：Surface and Interface Analysis
• 出版年：2016
• 出版时间：September 2016
• 年：2016
• 卷：48
• 期：9
• 页码：1012-1016
• 全文大小：399K
• ISSN：1096-9918

文摘

Alternate CrAlN/TiAlN multilayers with different repeated bilayer thickness ranging from 10 to 20 nm were prepared by sputtering Ti, Al and Cr targets with N₂ and Ar gases. The interface structures of multilayers such as the average individual thicknesses, the scattering length densities and interface roughness were characterized using nonpolarized specular neutron reflectometry. The experimental reflectivity can be well described by a multilayer model for all samples. The individual thickness in the repeated bilayers is close to the nominal thickness. The interface roughness diminishes as the thickness of the bilayer in mutilayers decreases. The asymmetric interface roughness on CrAlN-TiAlN-Si interfaces causes the larger interface roughness of CrAlN on TiAlN interface. The scattering length density profiles of multilayers suggest that the chemical composition is approximate to Cr_0.86Al_0.14N/Ti_0.5Al_0.5N and which is more accurate for thinner films. Copyright