Influence of annealing temperature on thermal stabilities of hydrogenated amorphous carbon on silicon nitride balls
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- 作者：Lei Huang ; Juntang Yuan ; yuanjuntang106@163.com" class="auth_mail" title="E-mail the corresponding author ; Chao Li ; Zhenhua Wang ; Tao Zhou ; Zengbin Yin
- 关键词：Hydrogenated amorphous carbon ; Annealing ; Silicon nitride ball ; Thermal stabilities
- 刊名：Vacuum
- 出版年：2016
- 出版时间：May 2016
- 年：2016
- 卷：127
- 期：Complete
- 页码：96-102
- 全文大小：2495 K
文摘
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Annealing treatment was carried out on a-C:H films on silicon nitride balls.
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Changes in structure, mechanical and tribological properties of the films were evaluated.
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Tribochemical reactions on the ball surface during the friction were discussed.
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