Deposition of fluorinated polyimide consisting of 6FDA and TFDB into microscale trenches using supercritical carbon dioxide
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- 作者：Masashi Harukia ; mharuki@se.kanazawa-u.ac.jp" class="auth_mail" title="E-mail the corresponding author ; Asuka Odab ; Atsuhiko Wasadab ; Shin-ichi Kiharab ; Shigeki Takishimab
- 关键词：Fluorinated polyimide ; Deposition ; 6FDA ; TFDB ; Supercritical carbon dioxide
- 刊名：The Journal of Supercritical Fluids
- 出版年：2017
- 出版时间：January 2017
- 年：2017
- 卷：119
- 期：Complete
- 页码：238-244
- 全文大小：2702 K
文摘
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Fluorinated polyimides was deposited on Si wafer with microscale trenches in scCO2.
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6FDA and TFDB were used as fluorinated monomers.
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Deposition behaviors strongly depended on the feed monomer concentrations at 250 °C.
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Slight temperature dependency on deposition behaviors inside trenches was observed.
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Phase behaviors inside the reactor were observed during the deposition.
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