Influence of oxygen post-treatment on laser-induced damage of antireflection coatings prepared by electron-beam evaporation and ion beam assisted deposition

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• 作者：Lei Yuan ; Congjuan Wang ; Yuanan Zhao ; Ji ; a Shao
• 关键词：Antireflection coating ; Oxygen post-treatment ; Laser-induced damage
• 刊名：Applied Surface Science
• 出版年：2008
• 出版时间：15 August 2008
• 年：2008
• 卷：254
• 期：20
• 页码：6346-6349
• 全文大小：540 K

文摘

Antireflection coatings at the center wavelength of 1053 nm were prepared on BK7 glasses by electron-beam evaporation deposition (EBD) and ion beam assisted deposition (IBAD). Parts of the two kinds of samples were post-treated with oxygen plasma at the environment temperature after deposition. Absorption at 1064 nm was characterized based on surface thermal lensing (STL) technique. The laser-induced damage threshold (LIDT) was measured by a 1064-nm Nd:YAG laser with a pulse width of 38 ps. Leica-DMRXE Microscope was applied to gain damage morphologies of samples. The results revealed that oxygen post-treatment could lower the absorption and increase the damage thresholds for both kinds of as-grown samples. However, the improving effects are not the same.