Measurement and characterization of a nano-scale multiple-step height sample using a stylus profiler
详细信息 查看全文
- 作者：Changsheng Lia ; li.changsheng@stu.xjtu.edu.cn" class="auth_mail" title="E-mail the corresponding author ; Shuming Yanga ; shuming.yang@mail.xjtu.edu.cn" class="auth_mail" title="E-mail the corresponding author ; Yiming Wanga ; wangyiming@stu.xjtu.edu.cn" class="auth_mail" title="E-mail the corresponding author ; Chenying Wangb ; wangchenying@mail.xjtu.edu.cn" class="auth_mail" title="E-mail the corresponding author ; Wei Renb ; wren@mail.xjtu.edu.cn" class="auth_mail" title="E-mail the corresponding author ; Zhuangde Jianga ; zdjiang@mail.xjtu.edu.c" class="auth_mail" title="E-mail the corresponding author
- 关键词：Three-step height ; Stylus profiler ; Characterization
- 刊名：Applied Surface Science
- 出版年：2016
- 出版时间：30 November 2016
- 年：2016
- 卷：387
- 期：Complete
- 页码：732-735
- 全文大小：953 K
文摘
- •
The three-step height samples were fabricated and measured by the stylus profiler.
- •
A low pass filter was employed to remove high frequency noises.
- •
A ten order polynomial was used to effectively remove the low frequency artefacts.
- •
The measurement uncertainties of the steps were between 1 nm and 2.2 nm.
- •
The deposition rate of the step films with uncertainty was calculated.
© 2004-2018 中国地质图书馆版权所有 京ICP备05064691号 京公网安备11010802017129号 地址：北京市海淀区学院路29号 邮编：100083 电话：办公室：(+86 10)66554848；文献借阅、咨询服务、科技查新：66554700 |