Improving the quality of femtosecond laser processing micro-hole array by coated with aluminum film on fused silica sheet

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• 作者：Zhuping Wang^a ; Guoying Feng^a ; ^{guoing_feng@scu.edu.cn" class="auth_mail" title="E-mail the corresponding author} ; Shutong Wang^a ; Guang Li^a ; Shenyu Dai^a ; Shouhuan Zhou^a ; ^b
• 关键词：Femtosecond laser processing ; Micro-hole array ; Fused silica sheet ; Aluminum film ; Quality
• 刊名：Optik - International Journal for Light and Electron Optics
• 出版年：2017
• 出版时间：January 2017
• 年：2017
• 卷：128
• 期：Complete
• 页码：178-184
• 全文大小：1731 K

文摘

We demonstrate a novel femtosecond laser beam machining method which is proposed to achieve better quality micro-machining. The fused silica sheet coated with aluminum film was prepared by Pulsed Laser Deposition (PLD) in the high vacuum chamber (below 5 × 10⁻⁴ Pa). After femtosecond laser ablation, the aluminum film on fused silica sheet was cleaned by hydrochloric acid solution (HCl) in a solution of 10% until the aluminum film was absolutely reacted, finally the micro-hole array was formed on the silica. The existing of a thin film is found to be effective for improving the quality of micro-machining. The micro-hole arrays fabricated by the new method were quite good in roundness and the morphology of single hole was relatively good, and the edges of the holes were with no cracks and recast layer. In addition, the effect of the fluence of femtosecond laser and the average diameter of the micro-hole array on the fused silica sheet was investigated. Finally, we examined the diffraction characteristic of the micro-hole array to reflect the overall morphology of holes.