An ANN approach for modeling the multisource yield learning process with semiconductor manufacturing as an example

详细信息    查看全文

• 作者：Toly Chen ^{tolychen@ms37.hinet.net}
• 关键词：Yield ; Learning ; Semiconductor ; Artificial neural network
• 刊名：Computers & Industrial Engineering
• 出版年：2017
• 出版时间：January 2017
• 年：2017
• 卷：103
• 期：Complete
• 页码：98-104
• 全文大小：531 K
• 卷排序：103

文摘

The future yield of a product in a wafer fabrication factory is estimated. An innovative approach is proposed for modeling the yield learning process with artificial neural networks. The effects of various sources of yield learning were separated.