A novel triangular-electrode based capacitive sensing method for MEMS resonant devices

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• 作者：Wei MaAuthor Vitae ; Yiyu LinAuthor Vitae ; Xudong ZhengAuthor Vitae ; Yidong LiuAuthor Vitae ; Zhonghe Jin ; ^{jinzh@zju.edu.cn}Author Vitae
• 关键词：Capacitive sensing ; Capacitive detection ; Triangular electrode ; Self-calibration ; MEMS resonant devices
• 刊名：Sensors and Actuators A: Physical
• 出版年：2016
• 出版时间：1 December 2016
• 年：2016
• 卷：252
• 期：Complete
• 页码：233-241
• 全文大小：3972 K
• 卷排序：252

文摘

A novel capacitive sensing method for MEMS resonant devices is proposed. The method relies on the nonlinearity of a triangular-electrode based capacitor. The method can accurately and robustly measure the motional amplitude and phase. Theoretical and experiment results confirm the feasibility of the proposed method. A micro-gyroscope using the proposed method is set up and tested.