Effects of oxygen-to-argon ratio on crystalline structure and properties of Y₂O₃ anti-reflection films for freestanding CVD diamond

详细信息    查看全文

• 作者：Chenyi Hua ^{hua07de@163.com} ; Liangxian Chen ; Chengming Li ; ^{chengmli@mater.ustb.edu.cn} ; Meng Wang ; Jianchao Guo ; Jinlong Liu ; Xiongbo Yan ; Yun Zhao ; Kang An ; Junjun Wei ; Lifu Hei
• 关键词：Y2O3 anti-reflection film ; CVD diamond ; Microstructure ; Properties
• 刊名：Journal of Alloys and Compounds
• 出版年：2017
• 出版时间：5 February 2017
• 年：2017
• 卷：693
• 期：Complete
• 页码：468-473
• 全文大小：1965 K
• 卷排序：693

文摘

The cubic and monoclinic phases of Y2O3 films were prepared on optical grade diamond substrates. The non-stoichiometry degree of the monoclinic Y2O3 film was higher than the cubic Y2O3 film. Both monoclinic and cubic Y2O3 films had an anti-reflection effect on diamond in 8–12 μm LWIR range. The Y2O3 film with a cubic phase had high resistance to abrasion and plastic deformation.