Cd doped NiO thin films successfully fabricated on glass substrates by spray at 460 °C. XRD study reveals that all t films are polycrystalline with cubic structure. The band gap energy of the films varies from 3.89 to 3.80 eV with Cd content. 3.0 wt% Cd-doped NiO based sensor showed excellent sensitivity toward 1000 ppm EtOH at operating temperature of 100 °C. The performance of the sensor is discussed in terms of surface morphology state.