X-ray diffraction analysis of residual stresses in textured ZnO thin films

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• 作者：E. Dobročka^a ; ^{edmund.dobrocka@savba.sk} ; P. Nová ; k^b ; D. Bú ; c^c ; L. Harmatha^c ; J. Murí ; n^d
• 关键词：Residual stress ; Grazing incidence X-ray diffraction ; ZnO ; Refraction of X-rays ; Texture ; X-ray stress factors
• 刊名：Applied Surface Science
• 出版年：2017
• 出版时间：15 February 2017
• 年：2017
• 卷：395
• 期：Complete
• 页码：16-23
• 全文大小：1648 K
• 卷排序：395

文摘

Residual stress in ZnO thin films is measured. Effect of the refraction of X-rays on the stress evaluation is analyzed. Effect of texture on the evaluation of residual stresses is analyzed. Crystallite group method and the Reuss model are compared.