Oxygen-controlled structures and properties of transparent conductive SnO₂:F films

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• 作者：Fayu Wu^a ; Xinru Tong^a ; Zhuo Zhao^a ; Jianbo Gao^a ; Yanwen Zhou^a ; ^{zhouyanwen@ustl.edu.cn} ; Peter Kelly^b ; ^{peter.kelly@mmu.ac.uk}
• 关键词：FTO ; Structures ; TCO materials ; Magnetron sputtering ; Oxygen flow
• 刊名：Journal of Alloys and Compounds
• 出版年：2017
• 出版时间：25 February 2017
• 年：2017
• 卷：695
• 期：Complete
• 页码：765-770
• 全文大小：1890 K
• 卷排序：695

文摘

The FTO structures could be controlled by O- flow in the sputtering atmosphere. The properties of the FTO films could be customized by combination Sn with F/O. The slightly O-deficient FTO films were with polar structure and low resistivity. The O-rich FTO films were with un-polar structure and high transparency.