Surface defects evaluation system based on electromagnetic model simulation and inverse-recognition calibration method

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• 作者：Yongying Yang ; ^{chuyyy@zju.edu.cn} ; Huiting Chai ; Chen Li ; Yihui Zhang ; Fan Wu ; Jian Bai ; Yibing Shen
• 关键词：Surface defects ; Microscopic scattering dark-field imaging ; Finite-difference time-domain ; Inverse-recognition calibration method
• 刊名：Optics Communications
• 出版年：2017
• 出版时间：1 May 2017
• 年：2017
• 卷：390
• 期：Complete
• 页码：88-98
• 全文大小：1560 K
• 卷排序：390

文摘

A scattering imaging electromagnetic simulation model is established. A novel inverse-recognition calibration method is put forward. Diffraction-broadening effect is analyzed in detail. Defects are positioned at low magnification and evaluated at high magnification.