Adhesion behavior of diamond-like carbon films with F and Si co-doping prepared by radio frequency reactive magnetron sputtering

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• 作者：Wei Wu ; Zhipeng Zhu ; Jiawei Min ; Jiandong Zhang ; Non Qian ; Meifu Jiang ; ^{dxwlb@suda.edu.cn}
• 关键词：Radio frequency reactive magnetron sputtering ; Adhesive behavior ; Co-doping ; DLC films
• 刊名：Thin Solid Films
• 出版年：2017
• 出版时间：31 January 2017
• 年：2017
• 卷：622
• 期：Complete
• 页码：89-94
• 全文大小：963 K
• 卷排序：622

文摘

F and Si co-doped DLC (DLC:F:Si) films with good adherence could be deposited. Bonding configurations were analyzed to reveal the adhesion evolution. The contents of CF and SiC bonds affected clearly adhesion of DLC:F:Si films. A mechanism for RF powers affecting DLC:F:Si films adhesion behavior is proposed.