Frequency Tuning of Collapse-Mode Capacitive Micromachined Ultrasonic Transducer

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• 作者：Martin Pekař^a ; ^b ; ^{martin.pekar@philips.com} ; Wendy U. Dittmer^a ; Nenad Mihajlović^a ; Gijs van Soest^b ; Nico de Jong^c ; ^b
• 关键词：CMUT ; Capacitive micromachined ultrasonic transducer ; Ultrasound ; Multi-frequency ; Imaging ; Intracardiac ; Frequency tuning ; Collapse mode ; Deep-collapse mode
• 刊名：Ultrasonics
• 出版年：2017
• 出版时间：February 2017
• 年：2017
• 卷：74
• 期：Complete
• 页码：144-152
• 全文大小：1680 K
• 卷排序：74

文摘

Frequency tuning of CMUT operated in (deep-)collapse mode is experimentally quantified. The CMUT is operated at bias voltages up to three times higher than the collapse voltage. Fabricated CMUT operates reliably for single-use imaging catheter application. Images are constructed based on combinations of driving frequency and bias voltage. Reciprocity measurements indicate the same bias voltage can be used for transmit and receive.