Ion-Beam-Induced Dual-Tone Imaging of Polyimide via Two-Step Imidization

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• 作者：Yasuyuki Suzuki ; Yasunari Maekawa ; Masaru Yoshida ; Katsuya Maeyama ; and Noriyuki Yonezawa
• 刊名：Chemistry of Materials
• 出版年：2002
• 出版时间：October 2002
• 年：2002
• 卷：14
• 期：10
• 页码：4186 - 4191
• 全文大小：237K
• 年卷期：v.14,no.10(October 2002)
• ISSN：1520-5002

文摘

Dual-tone images in polyimide (Kapton) films were prepared by ion beam irradiation ofpartially imidized polyamic acid (PAA) films followed by alkaline etching in aqueoustetramethylammonium hydroxide (TMAH) solution. The treated films were heated at a finaltime for thermal stability. In partially imidized PAA films prepared at 150 C, ion beamirradiation produced a negative hemispheric structured image with 1.0-m height and 1.5-m diameter. In contrast, a positive hole pattern with 0.3-m diameter appeared on thepartially imidized PAA film prepared at 145 C. By determination of the precise imidizationdegree of precursor polymer films on the basis of adsorption strength of an imide ring C-Nbond (1380 cm^-1) in an attenuated total reflection infrared (ATR-IR) spectrum, it wasrevealed that the image mode of the films switches within a narrow range of imidizationdegree; positive and negative images were obtained from the PAA films with 67-83% and89-94% imidization degrees, respectively.