Highly Conductive and Conformal Poly(3,4-ethylenedioxythiophene) (PEDOT) Thin Films via Oxidative Molecular Layer Deposition

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• 作者：Sarah E. Atanasov ; Mark D. Losego ; Bo Gong ; Edward Sachet ; Jon-Paul Maria ; Philip S. Williams ; Gregory N. Parsons
• 刊名：Chemistry of Materials
• 出版年：2014
• 出版时间：June 10, 2014
• 年：2014
• 卷：26
• 期：11
• 页码：3471-3478
• 全文大小：424K
• 年卷期：v.26,no.11(June 10, 2014)
• ISSN：1520-5002

文摘

This work introduces oxidative molecular layer deposition (oMLD) as a chemical route to synthesize highly conductive and conformal poly(3,4-ethylenedioxythiophene) (PEDOT) thin films via sequential vapor exposures of molybdenum(V) chloride (MoCl₅, oxidant) and ethylene dioxythiophene (EDOT, monomer) precursors. The growth temperature strongly affects PEDOT鈥檚 crystalline structure and electronic conductivity. Films deposited at 150 掳C exhibit a highly textured crystalline structure, with {010} planes aligned parallel with the substrate. Electrical conductivity of these textured films is routinely above 1000 S cm^鈥?, with the most conductive films exceeding 3000 S cm^鈥?. At lower temperatures (100 掳C) the films exhibit a random polycrystalline structure and display smaller conductivities. Compared with typical electrochemical, solution-based, and chemical vapor deposition techniques, oMLD PEDOT films achieve high conductivity without the need for additives or postdeposition treatments. Moreover, the sequential-reaction synthesis method produces highly conformal coatings over high aspect ratio structures, making it attractive for many device applications.