Synthesis and Characterization of Diamond Microcrystals and Nanorods Deposited by Hot Cathode Direct Current Plasma Chemical Vapor Deposition Method

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• 作者：Leyong Zeng ; Hongyan Peng ; Weibiao Wang ; Yuqiang Chen ; Da Lei ; Wentao Qi ; Jingqiu Liang ; Jialong Zhao ; Xianggui Kong ; Hong Zhang
• 刊名：Journal of Physical Chemistry C
• 出版年：2008
• 出版时间：April 17, 2008
• 年：2008
• 卷：112
• 期：15
• 页码：6160 - 6164
• 全文大小：388K
• 年卷期：v.112,no.15(April 17, 2008)
• ISSN：1932-7455

文摘

(111) diamond microcrystals and (100) diamond microcrystals and nanorods were synthesized on Si substrateby hot cathode direct current plasma chemical vapor deposition method. The morphology, structure, andoptical properties of the diamond films were characterized by scanning electron microscopy, X-ray diffraction,Raman spectra, and Fourier transform infrared spectra. The results showed that (111) and (100) diamondfilms can be grown under the condition of high-temperature (1223 K), low CH₄ concentration (4/300 sccm)and low temperature (1098 K), high CH₄ concentration (6/300 sccm), respectively. The (100) diamond filmhas lower purity and quality but higher optical transmittance than the (111) diamond film. Thus, the reactortemperature and CH₄ concentration are responsible for the growth of diamond films.