Synthesis and Characterization of Fluorinated Aminoalkoxide and Iminoalkoxide Gallium Complexes: Application in Chemical Vapor Deposition of Ga2O3 Thin Films

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• 作者：Yun Chi ; Tsung-Yi Chou ; Yi-Jen Wang ; Shu-Fen Huang ; Arthur J. Carty ; Ludmila Scoles ; Konstantin A. Udachin ; Shie-Ming Peng ; and Gene-Hsiang Lee
• 刊名：Organometallics
• 出版年：2004
• 出版时间：January 5, 2004
• 年：2004
• 卷：23
• 期：1
• 页码：95 - 103
• 全文大小：229K
• 年卷期：v.23,no.1(January 5, 2004)
• ISSN：1520-6041

文摘

Gallium trichloride, GaCl₃, reacts with the in situ prepared sodium salt of an aminoalkoxideor iminoalkoxide, denoted as NaL, to give the disubstituted compounds GaL₂Cl, where L =OC(CF₃)₂CH₂NMe₂ (1), OC(CF₃)₂CH₂C(Me)=NMe (2). Single-crystal X-ray diffraction studieson 1 and 2 indicated the formation of a trigonal-bipyramidal structure with chloride andalkoxy groups occupying the equatorial sites and the nitrogen donors located at the axialpositions. For the related trimethylgallium reagent GaMe₃, addition of an equal amount ofamino alcohol LH induced the elimination of methane to afford the complexes GaMe₂L, whereL = OC(CF₃)₂CH₂NHMe (3), OC(CF₃)₂CH₂NHBu^t (4), OC(CF₃)₂CH₂NMe₂ (5), in high yields.The crystal structure of 5 was determined by X-ray diffraction, showing a distorted-tetrahedral framework which differs greatly from that observed in the trigonal-bipyramidalGa complexes 1 and 2. Variable-temperature ¹H NMR studies on 3 and 4 indicated theoccurrence of rapid NGa bond scission, followed by recoordination with a change of theabsolute configuration. A lower activation barrier was observed for the Bu^t complex 4 uponchanging solvents from CDCl₃ to more polar media such as deuterated toluene and THF.Complexes 1 and 4 were then evaluated as potential precursor molecules for the chemicalvapor deposition of Ga₂O₃, and the as-deposited films were analyzed using scanning electronmicrographs (SEM), X-ray photoelectron spectroscopy (XPS), and Rutherford backscattering(RBS).