Optimization of Chemical Structure of Schottky-Type Selection Diode for Crossbar Resistive Memory

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• 作者：Gun Hwan Kim ; Jong Ho Lee ; Woojin Jeon ; Seul Ji Song ; Jun Yeong Seok ; Jung Ho Yoon ; Kyung Jean Yoon ; Tae Joo Park ; Cheol Seong Hwang
• 刊名：ACS Applied Materials & Interfaces
• 出版年：2012
• 出版时间：October 24, 2012
• 年：2012
• 卷：4
• 期：10
• 页码：5338-5345
• 全文大小：474K
• 年卷期：v.4,no.10(October 24, 2012)
• ISSN：1944-8252

文摘

The electrical performances of Pt/TiO₂/Ti/Pt stacked Schottky-type diode (SD) was systematically examined, and this performance is dependent on the chemical structures of the each layer and their interfaces. The Ti layers containing a tolerable amount of oxygen showed metallic electrical conduction characteristics, which was confirmed by sheet resistance measurement with elevating the temperature, transmission line measurement (TLM), and Auger electron spectroscopy (AES) analysis. However, the chemical structure of SD stack and resulting electrical properties were crucially affected by the dissolved oxygen concentration in the Ti layers. The lower oxidation potential of the Ti layer with initially higher oxygen concentration suppressed the oxygen deficiency of the overlying TiO₂ layer induced by consumption of the oxygen from TiO₂ layer. This structure results in the lower reverse current of SDs without significant degradation of forward-state current. Conductive atomic force microscopy (CAFM) analysis showed the current conduction through the local conduction paths in the presented SDs, which guarantees a sufficient forward-current density as a selection device for highly integrated crossbar array resistive memory.

Keywords:

Schottky diode; RRAM; crossbar; sneak current; selection device; Schottky barrier