Highly Porous Metal Oxide Networks of Interconnected Nanotubes by Atomic Layer Deposition

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• 作者：Fengbin Li ; Xueping Yao ; Zhaogen Wang ; Weihong Xing ; Wanqin Jin ; Jun Huang ; Yong Wang
• 刊名：Nano Letters
• 出版年：2012
• 出版时间：September 12, 2012
• 年：2012
• 卷：12
• 期：9
• 页码：5033-5038
• 全文大小：447K
• 年卷期：v.12,no.9(September 12, 2012)
• ISSN：1530-6992

文摘

Mesoporous metal oxide networks composed of interconnected nanotubes with ultrathin tube walls down to 3 nm and high porosity up to 90% were fabricated by atomic layer deposition (ALD) of alumina or titania onto templates of swelling-induced porous block copolymers. The nanotube networks possessed dual sets of interconnected pores separated by the tube wall whose thickness could be finely tuned by altering ALD cycles. Because of the excellent pore interconnectivity and high porosity, the alumina nanotube networks showed superior humidity-sensing performances.

Keywords:

Atomic layer deposition; block copolymers; mesoporous materials; metal oxides