Controllable Electrical Properties of Metal-Doped In2O3 Nanowires for High-Performance Enhancement-Mode Transistors

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• 作者：Xuming Zou ; Xingqiang Liu ; Chunlan Wang ; Ying Jiang ; Yong Wang ; Xiangheng Xiao ; Johnny C. Ho ; Jinchai Li ; Changzhong Jiang ; Qihua Xiong ; Lei Liao
• 刊名：ACS Nano
• 出版年：2013
• 出版时间：January 22, 2013
• 年：2013
• 卷：7
• 期：1
• 页码：804-810
• 全文大小：486K
• 年卷期：v.7,no.1(January 22, 2013)
• ISSN：1936-086X

文摘

In recent years, In₂O₃ nanowires (NWs) have been widely explored in many technological areas due to their excellent electrical and optical properties; however, most of these devices are based on In₂O₃ NW field-effect transistors (FETs) operating in the depletion mode, which induces relatively higher power consumption and fancier circuit integration design. Here, n-type enhancement-mode In₂O₃ NW FETs are successfully fabricated by doping different metal elements (Mg, Al, and Ga) in the NW channels. Importantly, the resulting threshold voltage can be effectively modulated through varying the metal (Mg, Ga, and Al) content in the NWs. A series of scaling effects in the mobility, transconductance, threshold voltage, and source鈥揹rain current with respect to the device channel length are also observed. Specifically, a small gate delay time (0.01 ns) and high on-current density (0.9 mA/渭m) are obtained at 300 nm channel length. Furthermore, Mg-doped In₂O₃ NWs are then employed to fabricate NW parallel array FETs with a high saturation current (0.5 mA), on/off ratio (>10⁹), and field-effect mobility (110 cm²/V路s), while the subthreshold slope and threshold voltage do not show any significant changes. All of these results indicate the great potency for metal-doped In₂O₃ NWs used in the low-power, high-performance thin-film transistors.

Keywords:

In₂O₃ nanowires; field-effect transistors; enhancement-mode; controllable threshold voltage; doping