Nucleation and Growth of Silver Nanoparticles by AB and ABC-Type Atomic Layer Deposition

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• 作者：Sicelo S. Masango ; Lingxuan Peng ; Laurence D. Marks ; Richard P. Van Duyne ; Peter C. Stair
• 刊名：Journal of Physical Chemistry C
• 出版年：2014
• 出版时间：August 7, 2014
• 年：2014
• 卷：118
• 期：31
• 页码：17655-17661
• 全文大小：414K
• ISSN：1932-7455

文摘

In this work, we report synthesis strategies to produce Ag nanoparticles by AB-type and ABC-type atomic layer deposition (ALD) using trimethylphosphine(hexafluoroacetylacetonato) silver(I) ((hfac)Ag(PMe₃)) and formalin (AB-type) and (hfac)Ag(PMe₃), trimethylaluminum, and H₂O (ABC-type). In situ quartz crystal microbalance measurements reveal a Ag growth rate of 1鈥? ng/cm²/cycle by ABC-type ALD at 110 掳C and 2鈥?0 ng/cm²/cycle for AB-type ALD at 170鈥?00 掳C. AB-type Ag ALD has a nucleation period before continuous linear growth that is shorter at 200 掳C. Transmission electron microscopy reveals that AB-type Ag ALD particles have an average size of 1.8 nm after 10 cycles. ABC-type Ag ALD particles have an average size of 2.2 nm after 20 cycles. With increasing ALD cycles, ABC-type Ag ALD increases the metal loading while maintaining the particle size but AB-type Ag ALD results in the formation of bigger particles in addition to small particles. The ability to synthesize supported metal nanoparticles with well-defined particle sizes and narrow size distributions makes ALD an attractive synthesis method compared to conventional wet chemistry techniques.