The Smallest Resonator Arrays in Atmosphere by Chip-Size-Grown Nanowires with Tunable Q-factor and Frequency for Subnanometer Thickness Detection

详细信息    查看全文

• 作者：Chengming Jiang ; Chaolong Tang ; Jinhui Song
• 刊名：Nano Letters
• 出版年：2015
• 出版时间：February 11, 2015
• 年：2015
• 卷：15
• 期：2
• 页码：1128-1134
• 全文大小：450K
• ISSN：1530-6992

文摘

A chip-size vertically aligned nanowire (NW) resonator arrays (VNRs) device has been fabricated with simple one-step lithography process by using grown self-assembled zinc oxide (ZnO) NW arrays. VNR has cantilever diameter of 50 nm, which breakthroughs smallest resonator record (>100 nm) functioning in atmosphere. A new atomic displacement sensing method by using atomic force microscopy is developed to effectively identify the resonance of NW resonator with diameter 50 nm in atmosphere. Size-effect and half-dimensional properties of the NW resonator have been systematically studied. Additionally, VNR has been demonstrated with the ability of detecting nanofilm thickness with subnanometer (<10^鈥?m) resolution.