Large-Area Nano-patterning and Fabrication of Vertical Transistor Array by Non-close-packed Polystyrene Spheres

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• 作者：Yen-Ming Chen ; Yu-Yen Lai ; Yu-Chiang Chao ; Hsiao-Wen Zan ; Hsin-Fei Meng ; Sheng-Fu Horng ; Che-Hao Chang
• 刊名：ACS Applied Materials & Interfaces
• 出版年：2015
• 出版时间：September 2, 2015
• 年：2015
• 卷：7
• 期：34
• 页码：18899-18903
• 全文大小：335K
• ISSN：1944-8252

文摘

We demonstrated a large-area nanopatterning technique with the help of a non-close-packed PS sphere layer over a large-area substrate. The non-close-packed PS sphere layer is fabricated by blade coating method. It was demonstrated that non-close-packed PS spheres can be achieved within an area of 18 cm 脳 25 cm on a rigid glass substrate and within an area of 10 cm 脳 10 cm on a flexible substrate. We also demonstrated that the blade-coated non-close-packed PS sphere layer was suitable for the mass production of vertical organic transistors over a large area.