Phase-Engineered Synthesis of Centimeter-Scale 1T鈥? and 2H-Molybdenum Ditelluride Thin Films

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• 作者：Jin Cheol Park ; Seok Joon Yun ; Hyun Kim ; Ji-Hoon Park ; Sang Hoon Chae ; Sung-Jin An ; Jeong-Gyun Kim ; Soo Min Kim ; Ki Kang Kim ; Young Hee Lee
• 刊名：ACS Nano
• 出版年：2015
• 出版时间：June 23, 2015
• 年：2015
• 卷：9
• 期：6
• 页码：6548-6554
• 全文大小：621K
• ISSN：1936-086X

文摘

We report the synthesis of centimeter-scale, uniform 1T鈥? and 2H-MoTe₂ thin films via the tellurization of Mo thin films. 1T鈥?MoTe₂ was initially grown and converted gradually to 2H-MoTe₂ over a prolonged growth time under a Te atmosphere. Maintaining excessive Te was essential for obtaining the stable stoichiometric 2H-MoTe₂ phase. Further annealing under a lower partial pressure of Te at the same temperature, followed by a rapid quenching, led to the reverse phase transition from 2H-MoTe₂ to 1T鈥?MoTe₂. The orientation of the 2H-MoTe₂ film was determined by the tellurization rate. Slow tellurization was the key for obtaining a highly oriented 2H-MoTe₂ film over the entire area, while fast tellurization led to a 2H-MoTe₂ film with a randomly oriented c-axis.