High-Throughput Fabrication of Resonant Metamaterials with Ultrasmall Coaxial Apertures via Atomic Layer Lithography

详细信息    查看全文

• 作者：Daehan Yoo ; Ngoc-Cuong Nguyen ; Luis Martin-Moreno ; Daniel A. Mohr ; Sol Carretero-Palacios ; Jonah Shaver ; Jaime Peraire ; Thomas W. Ebbesen ; Sang-Hyun Oh
• 刊名：Nano Letters
• 出版年：2016
• 出版时间：March 9, 2016
• 年：2016
• 卷：16
• 期：3
• 页码：2040-2046
• 全文大小：515K
• ISSN：1530-6992

文摘

We combine atomic layer lithography and glancing-angle ion polishing to create wafer-scale metamaterials composed of dense arrays of ultrasmall coaxial nanocavities in gold films. This new fabrication scheme makes it possible to shrink the diameter and increase the packing density of 2 nm-gap coaxial resonators, an extreme subwavelength structure first manufactured via atomic layer lithography, both by a factor of 100 with respect to previous studies. We demonstrate that the nonpropagating zeroth-order Fabry-Pérot mode, which possesses slow light-like properties at the cutoff resonance, traps infrared light inside 2 nm gaps (gap volume ∼ λ³/10⁶). Notably, the annular gaps cover only 3% or less of the metal surface, while open-area normalized transmission is as high as 1700% at the epsilon-near-zero (ENZ) condition. The resulting energy accumulation alongside extraordinary optical transmission can benefit applications in nonlinear optics, optical trapping, and surface-enhanced spectroscopies. Furthermore, because the resonance wavelength is independent of the cavity length and dramatically red shifts as the gap size is reduced, large-area arrays can be constructed with λ_resonance ≫ period, making this fabrication method ideal for manufacturing resonant metamaterials.