Fast Fabrication of Sub-200-nm Nanogrooves Using Liquid Crystal Material

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• 作者：Dae Seok Kim ; Yun Jeong Cha ; Min-Jun Gim ; Dong Ki Yoon
• 刊名：ACS Applied Materials & Interfaces
• 出版年：2016
• 出版时间：May 11, 2016
• 年：2016
• 卷：8
• 期：18
• 页码：11851-11856
• 全文大小：387K
• 年卷期：0
• ISSN：1944-8252

文摘

Self-assembly of soft materials attracts keen interest for patterning applications owing to its ease and spontaneous behavior. We report the fabrication of nanogrooves using sublimation and recondensation of liquid crystal (LC) materials. First, well-aligned smectic LC structures are obtained on the micron-scale topographic patterns of the microchannel; then, the sublimation and recondensation process directly produces nanogrooves having sub-200-nm scale. The entire process can be completed in less than 30 min. After it is replicated using an ultraviolet-curable polymer, our platform can be used as an alignment layer to control other guest LC materials.