Self-Focused AlScN Film Ultrasound Transducer for Individual Cell Manipulation

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• 作者：Benpeng ZhuChunlong Fei ; Chen Wang ; Yuhang Zhu ; Xiaofei Yang ; Hairong Zheng ; Qifa Zhou ; K. Kirk Shung
• 刊名：ACS Sensor
• 出版年：2017
• 出版时间：January 27, 2017
• 年：2017
• 卷：2
• 期：1
• 页码：172-177
• 全文大小：585K
• ISSN：2379-3694

文摘

Precise cell positioning is indispensable in the fields of biophysics and cellular biology. Acoustic microbeam produced by a highly focused ultrasound transducer has recently been investigated for a particle or cell manipulation. By virtue of the relatively good piezoelectric property, Sc doped AlN film was introduced for a highly focused ultrasound transducer application. Using a sputtering approach, a self-focused AlScN film based device has been designed, fabricated, and characterized at a frequency of ∼230 MHz. It had a narrow lateral beam width (∼8.2 μm). The AlScN ultrasound transducer was not only shown to be capable of remote controlling a single 10 μm polystyrene microsphere in distilled water, but also demonstrated to possess the capability to manipulate without contact individual 10 μm epidermoid carcinoma cell in two dimensions within a range of hundreds of micrometers in phosphate buffered saline. Most importantly, the cell manipulation was realized in continuous mode and no switch-on and -off operation was needed. These results suggest that self-focused AlScN film ultrasound transducer is a promising candidate for biomedical and molecular biology applications.