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Design and fabrication of a resonant pressure sensor by combination of DETF quartz resonator and silicon diaphragm
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  • 作者：Rongjun Cheng ; Yulong Zhao ; Cun Li ; Bian Tian ; Zhongliang Yu…
  • 刊名：Microsystem Technologies
  • 出版年：2015
  • 出版时间：March 2015
  • 年：2015
  • 卷：21
  • 期：3
  • 页码：631-640
  • 全文大小：1,926 KB
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  • 刊物类别：Engineering
  • 刊物主题：Electronics, Microelectronics and Instrumentation
    Nanotechnology
    Mechanical Engineering
    Operating Procedures and Materials Treatment
  • 出版者：Springer Berlin / Heidelberg
  • ISSN：1432-1858
文摘
A new type of resonant pressure sensor is presented which is realized by combination of a double-ended tuning fork (DETF) quartz resonator and a silicon diaphragm. To examine the feasibility and investigate the performance of this innovation, theoretical analysis and finite elements method are employed to optimize the structure parameters. Micromachining technology are involved in the fabrication of the silicon diaphragm and the DETF quartz resonator, which are fabricated separately and bounded together afterwards. Performances of the sensor prototypes are experimentally investigated. Preliminary testing results demonstrate that the sensor features a high sensitivity of approximately 452.5?Hz/kPa in the operating range of 0-?kPa at room temperature, with a non-linearity

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