A MEMS piezoelectric solid disk gyroscope with improved sensitivity

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• 作者：Yuxiang Cheng ; Weiping Zhang ; Jian Tang ; Dianjun Sun…
• 刊名：Microsystem Technologies
• 出版年：2015
• 出版时间：June 2015
• 年：2015
• 卷：21
• 期：6
• 页码：1371-1377
• 全文大小：1,607 KB
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• 作者单位：Yuxiang Cheng (1)
  Weiping Zhang (1)
  Jian Tang (1)
  Dianjun Sun (1)
  Wenyuan Chen (1)
  
  1. National Key Laboratory of Science and Technology on Micro/Nano Fabrication Laboratory, Laboratory for Thin Film and Micro Fabrication of the Ministry of Education, Department of Micro-Nano Electronics, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai, 200240, China
  
• 刊物类别：Engineering
• 刊物主题：Electronics, Microelectronics and Instrumentation
  Nanotechnology
  Mechanical Engineering
  Operating Procedures and Materials Treatment
  
• 出版者：Springer Berlin / Heidelberg
• ISSN：1432-1858

文摘

This paper introduces a MEMS piezoelectric solid disk gyroscope. The gyroscope operates in an in-plane elliptic bulk acoustic wave mode with a frequency of 284?kHz. This gyroscope is an improvement of the solid piezoelectric gyroscope. A device, 6?mm in diameter, has been fabricated through the microelectromechanical systems process, and achieved a relatively high sensitivity and bias instability. In this paper, it is described that the design, fabrication, circuit system and characteristics of the piezoelectric solid disk gyroscope.