Enhanced Thermoelectric Properties of In-Doped ZnSb Thin Film with Surface Nanocrystallization

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• 作者：Zhuang-hao Zheng ; Ping Fan ; Jing-ting Luo…
• 关键词：Thin films ; thermoelectric ; nanocrystallization
• 刊名：Journal of Electronic Materials
• 出版年：2017
• 出版时间：February 2017
• 年：2017
• 卷：46
• 期：2
• 页码：1319-1323
• 全文大小：
• 刊物类别：Chemistry and Materials Science
• 刊物主题：Optical and Electronic Materials; Characterization and Evaluation of Materials; Electronics and Microelectronics, Instrumentation; Solid State Physics;
• 出版者：Springer US
• ISSN：1543-186X
• 卷排序：46

文摘

This work establishes the high-temperature properties of In-doped ZnSb thin films prepared by a multistep cosputtering method on flexible substrates. The microstructure and thermoelectric properties of the In-doped ZnSb thin films were investigated. X-Ray diffraction results indicated that the main peaks of the In-doped ZnSb thin films were related to ZnSb phase, with some nanocrystallization on the surface after In doping. All samples exhibited p-type conduction behavior, with increased Seebeck coefficient after In doping. The thermal conductivity decreased sharply for the In-doped samples with nanocrystallization, resulting in a ZT value almost six times higher than for undoped ZnSb thin film.