Effective shape-controlled growth of monolayer MoS₂ flakes by powder-based chemical vapor deposition

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• 作者：Sang Yoon Yang ; Gi Woong Shim ; Seung-Bum Seo ; Sung-Yool Choi
• 关键词：molybdenum disulfide ; CVD growth ; shape evolution ; diagram ; growth condition
• 刊名：Nano Research
• 出版年：2017
• 出版时间：January 2017
• 年：2017
• 卷：10
• 期：1
• 页码：255-262
• 全文大小：
• 刊物类别：Chemistry and Materials Science
• 刊物主题：Nanotechnology; Materials Science, general; Atomic/Molecular Structure and Spectra; Condensed Matter Physics; Biotechnology; Biomedicine, general;
• 出版者：Tsinghua University Press
• ISSN：1998-0000
• 卷排序：10

文摘

In the recent years, transition-metal dichalcogenides such as MoS₂ have attracted considerable attention owing to their unique structure and electronic properties. Chemical vapor deposition (CVD) is a popular method for producing MoS₂ flakes with different shapes. Here, we report an effective method for achieving a broad range of shape evolution in CVD-grown monolayer MoS₂ flakes. By controlling the S and MoO₃ temperatures, the shape of the monolayer MoS₂ flakes was varied from hexagonal to triangular via intermediate shapes such as truncated and multi-apex triangles. The shape evolution of the MoS₂ flakes can be explained by introducing the term “nominal Mo:S ratio”, which refers to the amount of loaded MoO₃ and evaporated S powders. By using the nominal Mo:S ratio, we predicted the potential reaction atmosphere and effectively controlled the actual proportion of MoO_3−x with respect to S in the growth region, along with the growth temperature. From the systematic investigation of the behavior of the shape evolution, we developed a shape-evolution diagram, which can be used as a practical guide for producing CVD-grown MoS₂ flakes with desired shapes.