Elimination of dispersion effect in a white-light scanning interferometer by using a spectral analyzer

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• 作者：Song-Jie Luo ; Osami Sasaki ; Yong-Xin Liu ; Xiao-Yan Li ; Zhi-Li Lin…
• 关键词：Interferometry ; Optical time domain reflectometry ; Phase measurement
• 刊名：Optical Review
• 出版年：2017
• 出版时间：February 2017
• 年：2017
• 卷：24
• 期：1
• 页码：27-32
• 全文大小：
• 刊物类别：Physics and Astronomy
• 刊物主题：Optics, Lasers, Photonics, Optical Devices; Atomic, Molecular, Optical and Plasma Physics; Quantum Optics; Microwaves, RF and Optical Engineering;
• 出版者：Springer Japan
• ISSN：1349-9432
• 卷排序：24

文摘

A general equation of the interference signal of white-light scanning interferometer (WSI) and its Fourier transform are derived. Based on these equations, a new method for elimination of a dispersion effect in WSI is proposed to measure exactly a reflecting surface position. A dispersion phase caused by the two sides of unequal length in a beam splitter is detected with a spectrally resolved interferometer (SRI). A spectral distribution is obtained by using Fourier transform from an interference signal detected with a WSI. The spectral phase of the SRI is subtracted from the spectral phase of the WSI to get a dispersion-free spectral phase, which provides an improved complex-valued interference signal where a position of zero phase is almost equal to a position of maximum amplitude. An accurate measurement is achieved by using the position of zero phase.