A novel robust design method for the sense mode of a MEMS vibratory gyroscope based on fuzzy reliability and Taguchi design

详细信息    查看全文

• 作者：ChunHua He ; QianCheng Zhao ; QinWen Huang…
• 关键词：MEMS gyroscope ; fuzzy reliability ; Taguchi design ; force rebalance control ; mode ; matching
• 刊名：Science China Technological Sciences
• 出版年：2017
• 出版时间：February 2017
• 年：2017
• 卷：60
• 期：2
• 页码：317-324
• 全文大小：
• 刊物类别：Engineering
• 刊物主题：Engineering, general;
• 出版者：Science China Press
• ISSN：1869-1900
• 卷排序：60

文摘

This paper proposes a novel robust design method for the sense mode of a MEMS vibratory gyroscope based on fuzzy reliability and Taguchi design. The principles of fuzzy reliability and Taguchi design are both introduced and described in detail. Experimental results demonstrate that the signal to noise ratio of the robust design scheme is better than those of the other experimental schemes. Over the full temperature range from −40 to 80°C, the temperature sensitivities of phase margin, gain margin, sensitivity margin, the maximum amplitude of open loop system, bandwidth of closed loop system, and the performance function of the robust design system are all smaller than those of the original design system. Meanwhile, the temperature sensitivity of the bandwidth of the robust design system is improved to 126 from 1075 ppm/°C. Moreover, the bias drift over the full temperature range of the robust design system is improved to 61°/h from 179°/h.